Microelectromechanical-system-based variable-focus liquid lens for capsule endoscopes

Japanese Journal of Applied Physics

Volumn 48, Issue 5, 2009, Pages 0524041-0524044

  Seo, Sang Won ^a   Han, Seungoh ^b   Seo, Jun Ho ^a   Kim, Young Mok ^a   Kang, Moon Sik ^a   Min, Nam Ki ^a   Choi, Woo Beom ^c   Sung, Man Young ^a  

^a Korea University   (South Korea)

^b Hoseo University   (South Korea)

^c BNP Science Co Ltd   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED BIAS; CAPSULE ENDOSCOPES; CYLINDER WALLS; DIELECTRIC LAYER; ELECTRO-WETTING PHENOMENON; FOCAL LENGTHS; LIQUID LENS; MICROELECTROMECHANICAL SYSTEMS; SILICON THIN FILM; THERMAL OXIDES; VARIABLE-FOCUS LIQUID LENS; WAFER BONDING PROCESS;

ELECTRONIC MEDICAL EQUIPMENT; LIQUIDS; OPTICAL INSTRUMENTS; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE; SILICON WAFERS; WAFER BONDING;

LENSES;

EID: 68349120452     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.48.052404     Document Type: Article

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