Cryogenic micromachining of PDMS for microfluidic chips

Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008

Volumn 2, Issue , 2008, Pages 20-23

  Kakinuma, Y ^a   Yasuda, N ^a   Aoyama, T ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENICS; FABRICATION; FLUIDIC DEVICES; MICROCHANNELS; MICROFLUIDICS; MILLING (MACHINING); PHOTOLITHOGRAPHY; PRECISION ENGINEERING;

CRYOGENIC MACHINING; MECHANICAL PROCESS; MICRO GROOVES; MICRO-MOLDING PROCESS; MICROFLUIDIC CHIP; RAPID FABRICATION; ROOM TEMPERATURE; SOFT POLYMERS;

SILICONES;

EID: 68049135010     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. Gracias A., Xu B. and Castracane J., Fabrication of Three-Dimensional Micro- Channels in SU8, Proc. of 9th Int. Conf. of μ-TAS, (2005) pp. 663-665.
2. Matsumura T and Ohno T., Glass Machining with Ball End Mill, Transactions of NAMRI of SME, Vol. 33, (2005) pp. 319-326.