Parameter optimization of microcantilevers optically excited by a semiconductor laser with optical feedback

Optik

Volumn 120, Issue 13, 2009, Pages 676-682

  Wang, Shaoqing ^a,b   Wang, Xiangzhao ^a,b   Liu, Yingming ^a   Huang, Bingjie ^a,b  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Microcantilever; Optical excitation; Optical feedback; Parameter optimization; Semiconductor laser

Indexed keywords

LANG-KOBAYASHI; MICRO-CANTILEVERS; MICROCANTILEVER; OPTICAL EXCITATION; OPTICAL POWER; PARAMETER OPTIMIZATION; RESONANT VIBRATIONS; THEORETICAL MODELS; WORKING PARAMETERS;

ALUMINUM; ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; LASER EXCITATION; LASERS; SEMICONDUCTOR LASERS; STRUCTURAL OPTIMIZATION;

FEEDBACK;

EID: 67949088199     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijleo.2008.02.019     Document Type: Article

References (14)

1. Gysin U., et al. Temperature dependence of the force sensitivity of silicon cantilevers. Phys. Rev. B. 69 (2004) 045403
2. Welham C.J., et al. A laterally driven micromachined resonant pressure sensor. Sensors Actuators A 52 (1996) 86-91
3. Lavrik N.V., and Datskos P.G. Femtogram mass detection using photothermally actuated nanomechanical resonators. Appl. Phys. Lett. 14 (2005) 699-706
4. Burg T.P., et al. Weighing of biomolecules, single cells and single nanoparticles in fluid. Nature 446 (2007) 1066-1069
5. Uttamchandani D., Li Z.N., Zhang L.M., and Culshaw B. All-fibre optical system for exciting and detecting the vibration of silicon microresonator sensors. Opt. Laser Eng. (1992) 119-126
6. Ramos D., et al. Photothermal excitation of microcantilevers in liquids. J. Appl. Phys. 99 (2006) 124904
7. Zhang L.M., Uttamchandani D., and Culshaw B. Transient excitation of silicon microresonator. Electron. Lett. 25 (1989) 149-150
8. Zhang L.M., Uttamchandani D., and Culshaw B. Excitation of silicon microresonators using short optical pulse. Sensors Actuators A 21 (1990) 391-393
9. Liu Y.M., Wang X.Z., and Wang X.F. Study on silicon micro-resonators by using a novel optical excitation and detection apparatus. Chin. Opt. Lett. 4 (2006) 309-310
10. Bass M. Handbook of Optics vol. 2 (1994), McGraw-Hill, New York
11. Kaye W.C., and Laby T.H. Tables of Physical and Chemical Constants (1995), Longman, Harlow
12. Churenkov A.V. Photothermal excitation and self-excitation of silicon microresonators. Sensors Actuators A 39 (1993) 141-148
13. Sandberg R., et al. Dynamics of damped cantilevers. Rev. Sci. Instrum. 71 (2000) 2772-2775
14. Lang R., and Kobayashi K. External optical feedback effects on semiconductor injection laser properties. IEEE J. Quantum. Electron. 16 (1980) 347-355