Roll-to-roll deposition of a semiconductor film on a flexible substrate for photovoltaics: Conception to reality

Industrial and Engineering Chemistry Research

Volumn 48, Issue 13, 2009, Pages 5923-5933

  Hanket, Gregory M ^c   Birkmire, Robert W ^c   Jackson, Scott C ^a   Rocheleau, Richard E ^b  

^a DUPONT COMPANY   (United States)

^b UNIVERSITY OF HAWAII   (United States)

^c UNIVERSITY OF DELAWARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMMERCIAL PRODUCTIONS; COMMERCIAL VIABILITY; ENGINEERING METHODOLOGY; ENGINEERING PRINCIPLES; FILM DEPOSITION; FLEXIBLE SUBSTRATE; LABORATORY SCALE; PHOTOVOLTAIC TECHNOLOGY; PHOTOVOLTAICS; ROLL TO ROLL; SEMICONDUCTOR FILMS; THIN-FILM DEPOSITIONS;

CHEMICAL ENGINEERING; HELIUM;

THERMAL EVAPORATION;

EID: 67650835422     PISSN: 08885885     EISSN: None     Source Type: Journal    
DOI: 10.1021/ie801659j     Document Type: Article

References (21)

1. Barnett, A. M.; Baron, B. N.; Masi, J. V.; Russell, T. W. F. Method for the Continuous Manufacture of Thin Film Solar Cells. U.S. Patent 4,318,938, March 9, 1982.
2. Card, F. E.; Galen, J. J. Method for Evaporation in Vacuum of Sublimable Materials. Rev. Sci. Instrum. 1961, 32, 858-859.
3. Eser, E.; Fields, S.; Hanket, G.; Birkmire, R. W.; Doody, J. Critical Issues in Vapor Deposition of Cu(InGa)Se2 on Polymer Web: Source Spitting and Back Contact Cracking. Proceedings of the 31st IEEE PVSC; Orlando, FL, 2005; pp 515-518.
4. Rocheleau, R. E.; Baron, B. N.; Russell, T. W. F. Analysis of Evaporation of Cadmium Sulfide for Manufacture of Solar Cells. AIChE J. 1982, 28 (4), 656-662.
5. Clausing, P. Uber die Strahlformung bei der Molekularstromung. Z Phys. 1930, 66, 471-476.
6. Shen, L. Y. L. Angular Distribution of Molecular Beams from Modified Knudsen Cells for Molecular-Beam Epitaxy. J. Vac. Sci. Technol. 1978, 15 (1), 10-12.
7. Stickney, R. E.; Keating, R. F.; Yamamoto, S.; Hastings, W. J. Angular Distribution of Flow from Orifices and Tubes at High Knudsen Numbers. J. Vac. Sci. Technol. 1967, 4 (1), 10-18.
8. Jackson, S. C.; Baron, B. N.; Rocheleau, R. E.; Russell, T. W. F. ; Molecular Beam Distributions from High Rate Sources. J. Vac. Sci. Technol., A 1985, 3 (5), 1916-1920.
9. Giordmane, J. A.; Wang, T. C. Molecular Beam Formation from Long Parallel Tubes. J. Appl. Phys. 1960, 31, 463-471.
10. Jackson, S. C.; Baron, B. N.; Rocheleau, R. E.; Russell, T. W. F. A Chemical Reaction Model for Physical Vapor Deposition of Compound Semiconductor Films. AIChE J. 1987, 33 (5), 711-721.
11. Phillips, J.; Birkmire, R.; Lasswell, P. Stability of thin-film Cu2S- based solar cells at VOC under continuous illumination. Proceedings ofthe 16th IEEEPVSC; San Diego, California, September 27-30, 1982; pp 719-722.
12. Repins, I.; et al. 19.9%-efficient ZnO/CdS/CuInGaSe2 Solar Cell with 81.2% Fill Factor. Pros. Photovolt.: Res. Appl. 2008, 16 (3), 235-239.
13. Izu, M.; Ellison, T. Roll-to-roll Manufacturing of Amorphous Silicon Alloy Solar Cells with in situ Cell Performance Diagnostics. Sol. Energy Mater. Sol. Cells. 2003, 78, 613-626.
14. Wendt, R. G.; Hanket, G. M.; Birkmire, R. W.; Russell, T. W. F.; Wiedemann, S. Thin-film, Flexible Photovoltaic Module. U.S. Patent 6,310,281, October 30, 2001.
15. Wendt, R. G.; Hanket, G. M.; Birkmire, R. W.; Russell, T. W. F.; Wiedemann, S. Fabrication of Thin-film, Flexible Photovoltaic Module. U.S. Patent 6,372,538, April 16, 2002.
16. Mickelsen, R.; Chen, W. Polycrystalline CuInSe2 Solar Cells. Proceedings of the 16th IEEE PVSC; 1982; pp 781-785.
17. Shafarman, W.; Zhu, J. Effect of Substrate Temperature and Deposition Profile on Evaporated Cu(InGa)Se2 Films and Devices. Thin Solid Films 2000, 361-362, 473-477.
18. Stolt, L.; et al. ZnO/CdS/CuInSe2 Thin-Film Solar Cells with Improved Performance. Appl. Phys. Lett. 1993, 62 (6)), 597-599.
19. Shafarman, W. N.; Stolt, L. Cu(InGa)Se2 Solar Cells. In Handbook of Photovoltaic Science and Engineering; Luque, A., Hegedus, S., Ed.; Wiley: New York, 2003; p 580.
20. Hanket, G. M.; Paulson, P. D.; Shafarman, W. N.; Birkmire, R. W. Deposition of Cu(InGa)Se2 by Inline Evaporation. Proceedings of the NCPV Program Review Meeting 2000; Denver, Colorado, April 16-19, 2000; pp 241 -242.
21. Mickelson; et al. Apparatus for forming thin-film heterojunction solar cells employing materials selected from the class of I- III- VI2 chalcopyrite compounds. U.S. Patent 4,392,451, 1983.