Real time characterization of hydrogenation mechanism of palladium thin films by in situ spectroscopic ellipsometry

Journal of Applied Physics

Volumn 106, Issue 1, 2009, Pages

  Yamada, Y ^a   Tajima, K ^a   Bao, S ^a   Okada, M ^a   Roos, A ^b   Yoshimura, K ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION OF; FILM SURFACES; IN-SITU; INITIAL STAGES; METAL LAYER; PD THIN FILMS; REAL TIME; TIME EVOLUTIONS;

HYDROGENATION; MIXTURES; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS;

PALLADIUM;

EID: 67650760517     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3160307     Document Type: Article

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