Characterization of 3C-SiC by spectroscopic ellipsometry

Physica Status Solidi (B) Basic Research

Volumn 218, Issue 1, 2000, Pages r1-r2

  Jansson, R ^a   Zangooie, S ^a   Arwin, H ^a   Jarrendahl K ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON CARBIDE; SPECTROSCOPIC ELLIPSOMETRY;

SILICON COMPOUNDS;

EID: 0034340725     PISSN: 03701972     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1521-3951(200003)218:13.0.co;2-0     Document Type: Article

References (3)

1. S. ZOLLNER, J. G. CHEN, E. DUDA, T. WETTEROTH, S. R. WILSON, and J. N. HILFIKER, J. Appl. Phys. 85, 8353 (1999).
2. S. A. ALTEROVITZ and J. A. WOOLLAM, in: Handbook of Optical Constants of Solids II, Ed. E. D. PALIK, Academic Press, New York 1991 (p. 705).
3. S. LOGOTHETIDIS and J. PETALAS, J. Appl. Phys. 80, 1768 (1996).