Multi channel micro neural probe fabricated with SOI

2009 ICME International Conference on Complex Medical Engineering, CME 2009

Volumn , Issue , 2009, Pages

  Wang, Shujing ^a   Pei, Weihua ^a   Guo, Kai ^a   Gui, Qiang ^a   Wang, Yu ^a   Zhang, Xu ^a   Tang, Jun ^a   Chen, Hongda ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MECHANICS; MEMS; PROBES; SILICON ON INSULATOR TECHNOLOGY;

EXTRACELLULAR; FABRICATING PROCESS; IMPEDANCE CHARACTERISTICS; MANUFACTURABILITY; MECHANICAL CHARACTERISTICS; MULTI CHANNEL; NEURAL PROBES; NEURAL RECORDINGS; PROCESS METHODS; SILICON ON INSULATOR;

FABRICATION;

EID: 67650678656     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/s11431-008-0272-9     Document Type: Conference Paper

References (8)

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