A lateral-field-excited LiTaO 3 high-frequency bulk acoustic wave sensor

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 56, Issue 4, 2009, Pages 779-787

  McCann, Donald F ^a   McGann, Jason M ^a   Parks, Jesse M ^a   Frankel, David J ^a   Da Cunha, Mauricio Pereira ^a   Vetelino, John F ^a  

^a UNIVERSITY OF MAINE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTE; BOTTOM SURFACES; BULK ACOUSTIC WAVE SENSORS; BULK ACOUSTIC WAVES; CRYSTAL SURFACES; DIELECTRIC CONSTANTS; EXPERIMENTAL MEASUREMENTS; FIELD EXCITATIONS; HIGH FREQUENCY; HIGH FREQUENCY HF; LATERAL FIELD EXCITATION; MECHANICAL AND ELECTRICAL PROPERTIES; PIEZOELECTRIC CRYSTALS; QUARTZ WAFERS; SELECTIVE LAYERS; SENSING SURFACE; TRANSVERSE SHEAR;

ACOUSTIC WAVES; ACOUSTICS; CRYSTAL ORIENTATION; ELECTRIC FIELDS; ELECTRIC PROPERTIES; ELECTRODES; MECHANICAL PROPERTIES; OXIDE MINERALS; QUARTZ; QUARTZ CRYSTAL MICROBALANCES;

DIELECTRIC LIQUIDS;

LITHIUM; LITHIUM TANTALATE OXIDE; OXIDE; TANTALUM;

ACOUSTICS; ARTICLE; CHEMISTRY; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MICROELECTROMECHANICAL SYSTEM; TRANSDUCER;

ACOUSTICS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LITHIUM; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; OXIDES; TANTALUM; TRANSDUCERS;

EID: 67650645259     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2009.1100     Document Type: Article

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