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Volumn 37, Issue 6 PART 1, 2009, Pages 797-808

Design of a microwave microplasma source at atmospheric pressure

Author keywords

Atmospheric pressure discharges; Linear resonator; Microplasma; Microwave; Optical diagnostics; Power coupling

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTRIC DISCHARGES; METAMATERIALS; MICROWAVES; OPTICAL EMISSION SPECTROSCOPY; PLASMA DEVICES;

EID: 67650338302     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2009.2016203     Document Type: Article
Times cited : (19)

References (31)
  • 2
    • 52349120152 scopus 로고    scopus 로고
    • Microplasmas: Sources, particle kinetics, and biomedical applications
    • Jun
    • F. Iza, G. J. Kim, S. M. Lee, J. K. Lee, J. L. Walsh, Y. T. Zhang, and M. G. Kong, "Microplasmas: Sources, particle kinetics, and biomedical applications," Plasma Process. Polym., vol. 5, no. 4, pp. 322-344, Jun. 2008.
    • (2008) Plasma Process. Polym , vol.5 , Issue.4 , pp. 322-344
    • Iza, F.1    Kim, G.J.2    Lee, S.M.3    Lee, J.K.4    Walsh, J.L.5    Zhang, Y.T.6    Kong, M.G.7
  • 3
    • 32144443702 scopus 로고    scopus 로고
    • Microplasmas, an emerging field of low-temperature plasma science and technology
    • Feb
    • R. Foest, M. Schmidt, and K. Becker, "Microplasmas, an emerging field of low-temperature plasma science and technology," Int. J. Mass Spectrom., vol. 248, no. 3, pp. 87-102, Feb. 2006.
    • (2006) Int. J. Mass Spectrom , vol.248 , Issue.3 , pp. 87-102
    • Foest, R.1    Schmidt, M.2    Becker, K.3
  • 4
    • 33947615638 scopus 로고    scopus 로고
    • Analytical detectors based on microplasma spectrometry
    • Apr
    • M. Miclea and J. Franzke, "Analytical detectors based on microplasma spectrometry," Plasma Chem. Plasma Process., vol. 27, no. 2, pp. 205-224, Apr. 2007.
    • (2007) Plasma Chem. Plasma Process , vol.27 , Issue.2 , pp. 205-224
    • Miclea, M.1    Franzke, J.2
  • 5
    • 3242807458 scopus 로고    scopus 로고
    • Microplasmas for chemical analysis: Analytical tools or research toys?
    • Jul
    • V. Karanassios, "Microplasmas for chemical analysis: Analytical tools or research toys?" Spectrochim. Acta B, At. Spectrosc., vol. 59, no. 7, pp. 909-928, Jul. 2004.
    • (2004) Spectrochim. Acta B, At. Spectrosc , vol.59 , Issue.7 , pp. 909-928
    • Karanassios, V.1
  • 6
    • 0033887580 scopus 로고    scopus 로고
    • A new low-power microwave plasma source using microstrip technology for atomic emission spectrometry
    • Feb
    • A. M. Bilgic, U. Engel, E. Voges, M. Kuckelheim, and J. A. C. Broekaert, "A new low-power microwave plasma source using microstrip technology for atomic emission spectrometry," Plasma Sources Sci. Technol., vol. 9, no. 1, pp. 1-4, Feb. 2000.
    • (2000) Plasma Sources Sci. Technol , vol.9 , Issue.1 , pp. 1-4
    • Bilgic, A.M.1    Engel, U.2    Voges, E.3    Kuckelheim, M.4    Broekaert, J.A.C.5
  • 7
    • 0036389945 scopus 로고    scopus 로고
    • The development of microplasmas for spectrochemical analysis
    • Sep
    • J. A. C. Broekaert, "The development of microplasmas for spectrochemical analysis," Anal. Bional. Chem., vol. 374, no. 2, pp. 182-187, Sep. 2002.
    • (2002) Anal. Bional. Chem , vol.374 , Issue.2 , pp. 182-187
    • Broekaert, J.A.C.1
  • 8
    • 34547455224 scopus 로고    scopus 로고
    • Evaluation and application of argon and helium microstrip plasma for the determination of mercury by the cold vapor technique and optical emission spectrometry
    • Aug
    • I. J. Zapata, P. Pohl, N. H. Bings, and J. A. C. Broekaert, "Evaluation and application of argon and helium microstrip plasma for the determination of mercury by the cold vapor technique and optical emission spectrometry," Anal. Bional. Chem., vol. 388, no. 8, pp. 1615-1623, Aug. 2007.
    • (2007) Anal. Bional. Chem , vol.388 , Issue.8 , pp. 1615-1623
    • Zapata, I.J.1    Pohl, P.2    Bings, N.H.3    Broekaert, J.A.C.4
  • 9
    • 20844456236 scopus 로고    scopus 로고
    • J. Kim and K. Terashima, 2.45 GHz microwave-excited atmospheric pressure air microplasmas based on microstrip technology, Appl. Phys. Lett., 86, no. 19, pp. 191 504-1-191 504-3, May 2005.
    • J. Kim and K. Terashima, "2.45 GHz microwave-excited atmospheric pressure air microplasmas based on microstrip technology," Appl. Phys. Lett., vol. 86, no. 19, pp. 191 504-1-191 504-3, May 2005.
  • 10
    • 51849094803 scopus 로고    scopus 로고
    • J. J. Narenda, T. A. Grotjohn, and J. Asmussen, Microstripline applicators for creating microplasma discharges with microwave energy, Plasma Sources Sci. Technol., 17, no. 3, pp. 035 027-1-035 027-11, Aug. 2008.
    • J. J. Narenda, T. A. Grotjohn, and J. Asmussen, "Microstripline applicators for creating microplasma discharges with microwave energy," Plasma Sources Sci. Technol., vol. 17, no. 3, pp. 035 027-1-035 027-11, Aug. 2008.
  • 11
    • 0042929491 scopus 로고    scopus 로고
    • Low-power microwave plasma source based on a microstrip split-ring resonator
    • Aug
    • F. Iza and J. Hopwood, "Low-power microwave plasma source based on a microstrip split-ring resonator," IEEE Trans. Plasma Sci., vol. 31, no. 4, pp. 782-787, Aug. 2003.
    • (2003) IEEE Trans. Plasma Sci , vol.31 , Issue.4 , pp. 782-787
    • Iza, F.1    Hopwood, J.2
  • 12
    • 4344672648 scopus 로고    scopus 로고
    • Rotational, vibrational, and excitation temperatures of a microwave-frequency microplasma
    • Apr
    • F. Iza and J. Hopwood, "Rotational, vibrational, and excitation temperatures of a microwave-frequency microplasma," IEEE Trans. Plasma Sci., vol. 32, no. 2, pp. 498-504, Apr. 2004.
    • (2004) IEEE Trans. Plasma Sci , vol.32 , Issue.2 , pp. 498-504
    • Iza, F.1    Hopwood, J.2
  • 13
    • 18744362488 scopus 로고    scopus 로고
    • Split-ring resonator microplasma: Microwave model, plasma impedance and power efficiency
    • May
    • F. Iza and J. Hopwood, "Split-ring resonator microplasma: Microwave model, plasma impedance and power efficiency," Plasma Sources Sci. Technol., vol. 14, no. 2, pp. 397-406, May 2005.
    • (2005) Plasma Sources Sci. Technol , vol.14 , Issue.2 , pp. 397-406
    • Iza, F.1    Hopwood, J.2
  • 15
    • 0004088245 scopus 로고    scopus 로고
    • Foundations for Microwave Engineering
    • R. E. Collin, Foundations for Microwave Engineering. New York: Wiley, 2001, p. 125.
    • (2001) New York: Wiley , pp. 125
    • Collin, R.E.1
  • 16
    • 0035867962 scopus 로고    scopus 로고
    • Production of CW high-density non-equilibrium plasma in the atmosphere using microgap discharge excited by microwave
    • Mar
    • A. Kono, T. Sugiyama, T. Goto, H. Furuhashi, and Y. Uchida, "Production of CW high-density non-equilibrium plasma in the atmosphere using microgap discharge excited by microwave," Jpn. J. Appl. Phys., vol. 40, no. 3B, pp. L238-L241, Mar. 2001.
    • (2001) Jpn. J. Appl. Phys , vol.40 , Issue.3 B
    • Kono, A.1    Sugiyama, T.2    Goto, T.3    Furuhashi, H.4    Uchida, Y.5
  • 17
    • 32244433094 scopus 로고    scopus 로고
    • Heat transport simulation for atmospheric-pressure high-density microgap plasma
    • Feb
    • A. Kono, T. Shibata, and M. Aramaki, "Heat transport simulation for atmospheric-pressure high-density microgap plasma," Jpn. J. Appl. Phys., vol. 45, no. 2A, pp. 940-945, Feb. 2006.
    • (2006) Jpn. J. Appl. Phys , vol.45 , Issue.2 A , pp. 940-945
    • Kono, A.1    Shibata, T.2    Aramaki, M.3
  • 18
    • 33645226340 scopus 로고    scopus 로고
    • Production and characterization of high-pressure microwave glow discharge in a microgap aiming at VUV light source
    • May
    • A. Kono, J. Wang, and M. Aramaki, "Production and characterization of high-pressure microwave glow discharge in a microgap aiming at VUV light source," Thin Solid Films, vol. 506/507, pp. 444-448, May 2006.
    • (2006) Thin Solid Films , vol.506-507 , pp. 444-448
    • Kono, A.1    Wang, J.2    Aramaki, M.3
  • 20
    • 67650319749 scopus 로고    scopus 로고
    • Available
    • [Online]. Available: http://www.cst.com/
  • 21
    • 0004088245 scopus 로고    scopus 로고
    • Foundations for Microwave Engineering
    • R. E. Collin, Foundations for Microwave Engineering. New York: Wiley, 2001, p. 482.
    • (2001) New York: Wiley , pp. 482
    • Collin, R.E.1
  • 22
    • 0004088245 scopus 로고    scopus 로고
    • Foundations for Microwave Engineering
    • R. E. Collin, Foundations for Microwave Engineering. New York: Wiley, 2001, p. 491.
    • (2001) New York: Wiley , pp. 491
    • Collin, R.E.1
  • 26
    • 67650295046 scopus 로고    scopus 로고
    • Available
    • [Online]. Available: http://www.specair-radiation.net/
  • 27
    • 67650288730 scopus 로고    scopus 로고
    • Available
    • [Online]. Available: http://www.sri.com/psd/lifbase/
  • 29
    • 0031387238 scopus 로고    scopus 로고
    • On the use of non-hydrogenic spectral line profiles for electron density diagnostics of inductively coupled plasmas
    • Dec
    • R. Konjević and N. Konjević, "On the use of non-hydrogenic spectral line profiles for electron density diagnostics of inductively coupled plasmas," Spectrochim. Acta B, At. Spectrosc., vol. 52, no. 14, pp. 2077-2084, Dec. 1997.
    • (1997) Spectrochim. Acta B, At. Spectrosc , vol.52 , Issue.14 , pp. 2077-2084
    • Konjević, R.1    Konjević, N.2
  • 30
    • 0000925447 scopus 로고
    • Stark broadening of visible neutral helium lines in a plasma
    • Mar
    • D. E. Kelleher, "Stark broadening of visible neutral helium lines in a plasma," J. Quant. Spectrosc. Radiat. Transf., vol. 25, no. 3, pp. 191-220, Mar. 1981.
    • (1981) J. Quant. Spectrosc. Radiat. Transf , vol.25 , Issue.3 , pp. 191-220
    • Kelleher, D.E.1
  • 31
    • 0043014575 scopus 로고    scopus 로고
    • Computer simulated Balmer-alpha, -beta and -gamma Stark line profiles for non-equilibrium plasmas diagnostics
    • Aug
    • M. A. Gigosos, M. Á. Gonzalez, and V. Cardeñoso, "Computer simulated Balmer-alpha, -beta and -gamma Stark line profiles for non-equilibrium plasmas diagnostics," Spectrochim. Acta B, At. Spectrosc., vol. 58, no. 8, pp. 1489-1504, Aug. 2003.
    • (2003) Spectrochim. Acta B, At. Spectrosc , vol.58 , Issue.8 , pp. 1489-1504
    • Gigosos, M.A.1    Gonzalez, M.A.2    Cardeñoso, V.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.