Mechanical properties of chemical-vapor-deposited silicon carbide using a nanoindentation technique

Journal of the Korean Ceramic Society

Volumn 45, Issue 9, 2008, Pages 518-523

  Kim, Jong Ho ^a   Lee, Hyeon Keun ^a   Park, Ji Yeon ^b   Kim, Weon Ju ^b   Kim, Do Kyung ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Korea Atomic Energy Research Institute   (South Korea)

Author keywords

Fracture toughness; Hardness; Modulus; Nanoindentation; Silicon carbide

Indexed keywords

CHEMICAL VAPOR DEPOSITION PROCESS; GRAPHITE STRUCTURES; GRAPHITE SUBSTRATE; LOAD DISPLACEMENTS; MODULUS; NANOINDENTATION TECHNIQUES; PREPARATION TECHNIQUE; SIC COATINGS; SILICON CARBIDE COATINGS;

CHEMICAL VAPOR DEPOSITION; FRACTURE; FRACTURE TOUGHNESS; GRAPHITE; HARDNESS; MICROSTRUCTURE; NANOINDENTATION; SILICON CARBIDE; SPECIMEN PREPARATION; VAPORS;

MECHANICAL PROPERTIES;

EID: 67650148324     PISSN: 12297801     EISSN: None     Source Type: Journal    
DOI: 10.4191/KCERS.2008.45.9.518     Document Type: Article

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