Densification study of ITO films during high temperature annealing by GISAXS

Physica B: Condensed Matter

Volumn 404, Issue 16, 2009, Pages 2146-2150

  Yang, Lili ^a   He, Xiaodong ^a   Ge, Dengteng ^a   Wei, Hua ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Densification; Fractal structure; GISAXS; ITO films; Pore

Indexed keywords

FRACTAL STRUCTURE; FRACTAL STRUCTURES; GISAXS; GRAZING INCIDENCE SMALL-ANGLE X-RAY SCATTERING; HIGH HEATING RATES; HIGH-TEMPERATURE ANNEALING; INTERNAL STRUCTURE; ITO FILMS; LOW TEMPERATURES; NEAR-SURFACE; PORE; SUPERCOOLING PROCESS; THERMAL CYCLE ANNEALING; THERMAL ROUTES; THERMAL-ANNEALING;

ANEMOMETERS; GELATION; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; SURFACE ROUGHNESS;

FRACTALS;

EID: 67650122097     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2009.04.004     Document Type: Article

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