Parylene-membrane piezoresistive pressure sensors with xef2-etched cavity

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 1568-1571

  Giacchino, Luca ^a   Tai, Yu Chong ^a  

^a California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; FLUORINE COMPOUNDS; MEMBRANES; SILICON NITRIDE;

ARRAY OF HOLES; CHEMICAL INERTNESS; DOUBLE SIDES; PARYLENE C; PARYLENE MEMBRANES; PARYLENES; PIEZORESISTIVE PRESSURE SENSORS; PIEZORESISTOR; SENSOR DESIGNS; WET SILICON ETCHINGS;

PRESSURE SENSORS;

EID: 67649989848     PISSN: 19300395     EISSN: 21689229     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716748     Document Type: Conference Paper

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