Materials selection and design of microelectrothermal actuators

IET Seminar Digest

Volumn 2006, Issue 11367, 2006, Pages 259-265

  Prasanna, S ^a   Spearing, S Mark ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Bimorphs; Optimisation; Thermo mechanical and Materials selection

Indexed keywords

BIMORPHS; CANDIDATE MATERIALS; DIFFERENT SUBSTRATES; FREE END; MATERIALS SELECTION; NOVEL MATERIALS; OPTIMAL PERFORMANCE; OPTIMISATION; OUT-OF-PLANE ACTUATION; PERFORMANCE METRICS; THERMAL BIMORPH ACTUATORS; THERMO-MECHANICAL AND MATERIALS SELECTION; THICKNESS RATIO;

ACTUATORS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; PHOTORESISTS; SILICONES; THERMOMECHANICAL TREATMENT; ZINC;

MATERIALS;

EID: 67649961403     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1049/ic:20060467     Document Type: Conference Paper

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