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Volumn , Issue , 2003, Pages 317-322

Influence of friction force on Seal Mechanism with one degree of freedom

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); ELECTROMAGNETS; MOBILE DEVICES; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; SOCIAL SCIENCES; TRIBOLOGY;

EID: 67649957133     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.2003.1249961     Document Type: Conference Paper
Times cited : (3)

References (8)
  • 2
    • 0000797257 scopus 로고
    • Piezoelectrically driven XY0 table for submicron lithography systems
    • K. Sugihara, I. Mori, T. Tojo, C. Itoh, M. Tabata, and T. Shinozaki, "Piezoelectrically Driven XY0 Table for Submicron Lithography Systems", Rev. Sci. Instrum 60(9), pp. 3024-3029, 1989.
    • (1989) Rev. Sci. Instrum , vol.60 , Issue.9 , pp. 3024-3029
    • Sugihara, K.1    Mori, I.2    Tojo, T.3    Itoh, C.4    Tabata, M.5    Shinozaki, T.6
  • 3
    • 0025627079 scopus 로고
    • Precise positioning Mechanism u tilizing rapid deformations of piezoelectric elements
    • Napa Valley, CA, USA
    • T. Higuchi, Y. Yamagata, K. Furutani, and K. Kudoh, "Precise Positioning Mechanism U tilizing Rapid Deformations of Piezoelectric Elements", Proc. IEEE Micro Electro Mech. Syst., Napa Valley, CA, USA, pp. 222-226, 1990.
    • (1990) Proc. IEEE Micro Electro Mech. Syst. , pp. 222-226
    • Higuchi, T.1    Yamagata, Y.2    Furutani, K.3    Kudoh, K.4
  • 4
    • 0004987529 scopus 로고
    • Ultrahigh vacuum precise positioning device utilizing rapid deformations of piezo-electric element
    • Y. Yamagata, T. Higuchi, H. Saeki and H. Ishimaru, "Ultrahigh Vacuum Precise Positioning Device Utilizing Rapid Deformations of Piezo-electric Element", J. Vac. Sci. Technol., 8(6), pp. 4098-4100, 1990.
    • (1990) J. Vac. Sci. Technol. , vol.8 , Issue.6 , pp. 4098-4100
    • Yamagata, Y.1    Higuchi, T.2    Saeki, H.3    Ishimaru, H.4
  • 5
    • 0035656810 scopus 로고    scopus 로고
    • Coarse motion performance of seal mechanism with three degrees of freedom using difference of frictional forces
    • K. Furutani, M. Furuichi, and N. Mohri, "Coarse motion Performance of Seal Mechanism with three degrees of freedom using difference of frictional forces", Meas. Sct. Technol, 12(12), pp. 2147-2153, 2001.
    • (2001) Meas. Sct. Technol , vol.12 , Issue.12 , pp. 2147-2153
    • Furutani, K.1    Furuichi, M.2    Mohri, N.3
  • 6
    • 0036058537 scopus 로고    scopus 로고
    • Positioning performance of l-shaped Seal Mechanism with 3 degrees of freedom
    • K. Furutani and N. Ohta, "Positioning Performance of L-shaped Seal Mechanism with 3 Degrees of Freedom", Proc. 2002 IEEE Int. Conf. Rob. Autom., pp. 3660-3665, 2002.
    • (2002) Proc. 2002 IEEE Int. Conf. Rob. Autom. , pp. 3660-3665
    • Furutani, K.1    Ohta, N.2
  • 7
    • 84945133750 scopus 로고    scopus 로고
    • Fine motion performance of Seal Mechanism with 3 degrees of freedom
    • in Japanese
    • th SEAD., pp. 569-572, 2002. [in Japanese]
    • (2002) th SEAD. , pp. 569-572
    • Kawagoe, K.1    Furitani, K.2
  • 8
    • 0031097016 scopus 로고    scopus 로고
    • The development of a 'walking drive' ultraprecision postioner
    • E. Syamoto, T. Moriwaki, "The development of a 'walking drive' ultraprecision postioner", Precis. Eng., 20(2), pp. 86-92, 1997
    • (1997) Precis. Eng. , vol.20 , Issue.2 , pp. 86-92
    • Syamoto, E.1    Moriwaki, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.