Positioning performance of L-shaped seal mechanism with 3 degrees of freedom

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 4, Issue , 2002, Pages 3660-3665

  Furutani, Katsushi ^a   Ohta, Noriyuki ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

Friction; Linear drive; Mobile device; Piezoelectric element; Positioning; Scanning probe microscope

Indexed keywords

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); ELECTROMAGNETS; FRICTION; PERFORMANCE; PIEZOELECTRIC DEVICES; PROBES;

CONTROLLED ELECTROMAGNETS; INCHWORM MECHANISM; PIEZOELECTRIC ACTUATORS; SCANNING PROBE MICROSCOPY; SEAL MECHANISM;

MOBILE ROBOTS;

EID: 0036058537     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. Piezoelectric electromechanical translation apparatus
2. Piezoelectrically driven XYθ table for submicron lithography systems
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4. A dual tunneling-unit scanning tunneling microscope
5. Development of micro-lathe
6. Piezoelectric push-pull micropositioner for ballistic electron emission microscope
7. A linear drive device to feed parallel shafts using piezoelectric actuators
8. Coarse motion performance of seal mechanism with three degrees of freedom using difference of frictional forces
9. Rigid XYθ table for ultraprecision machine tool driven by means of walking drive
10. Two-dimensional remote micropositioner for a scanning tunneling microscope
11. Displacement control of piezoelectric element by feedback of induced charge