Temperature-programmed GC using silicon microfabricated columns with integrated heaters and temperature sensors

Analytical Chemistry

Volumn 79, Issue 7, 2007, Pages 2911-2917

  Reidy, Shaelah ^a   George, Don ^a   Agah, Masoud ^b   Sacks, Richard ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; GAS CHROMATOGRAPHY; GASES; ORGANIC POLYMERS; SILICON WAFERS; TEMPERATURE CONTROL; TEMPERATURE SENSORS; VELOCITY CONTROL;

INTEGRATED HEATERS; TEMPERATURE PROGRAMMING;

MICROCONTROLLERS;

DIMETICONE; SILICON;

ANALYTIC METHOD; ARTICLE; GAS CHROMATOGRAPHY; HEATING; SENSOR; TEMPERATURE; TEMPERATURE MEASUREMENT; TEMPERATURE SENSE;

CHROMATOGRAPHY, GAS; ELECTRODES; EQUIPMENT DESIGN; HEATING; SENSITIVITY AND SPECIFICITY; SILICON; TEMPERATURE; TIME FACTORS;

EID: 34247188035     PISSN: 00032700     EISSN: None     Source Type: Journal    
DOI: 10.1021/ac062148s     Document Type: Article

References (31)

1. Lorenselli, L.; Benvenuto, A.; Adami, A.; Guarnieri, V.; Margesin, B.; Mulloni, V.; Vincenzi, D. Biosens. Bioelectron. 2005, 20, 1968-1976.
2. Bhushan, A.; Yemane, D.; Pasupuleti, P.; Overton, E. B.; Goettert, J.; Murphy, M. C. Fabrication and Testing of High Aspect Ratio Metal Micro-Gas Chromatograph Columns. In Proceedings of the 2004 ASME International Mechanical Engineering Congress & Expo; ASME Press: New York, 2004; pp 13-19.
3. Bhushan, A.; Challa, V.; McKeon, J.; Yemane, D.; Overton, E. B.; Murphy, M. C.; Goettert. J. Application of Scanning Acoustic Microscopy in Characterizing Metal Micro Gas Chromatograph Columns. TMS Lett. 2004, 1 (7), 145-146.
4. Manginell, R. P.; Okandan, M.; Bauer, J. M.; Manley, R. G.; Trudell, D.; Kottenstette, R. J.; Lewis, P. R.; Adkins, D.; Heller, E. J.; Stewart, H.; Shul, R. J. Advancements in the Monolithically Integrated MicroChemLab™. In Micro Total Analysis Systems 2004 - Proceedings of μTAS 2004; Royal Society of Chemistry: London, 2005; Vol. 2, No. 297, pp 61-63.
5. Overton, E. B.; Carney, K. R.; Roques, N.; Dharmasena, H. P. Field Anal. Chem. Technol. 2001, 5 (1-2), 97.
6. Yu, C. M.; Lucas, M.; Koo, C.; Stratton, P.; DeLima, T.; Behymer, E. Micro-Electro-Mech. Syst. (MEMS) 1998, 66, 481.
7. Noh, H.; Hesketh, P. J.; Frye-Mason, G. C. J. Microelectromech. Syst. 2002, 11 (6), 718.
8. Kolesar, E. D.; Reston, R. R. IEEE Trans. Compon., Packag., Manuf. Technol. 1998, 21 (4), 324.
9. Matzke, C. M.; Kottenstette, S. A.; Casalnuovo, G. C.; Frye-Mason, G.; Hudson, M. L.; Sasaki, D. Y.; Manginell, R. P.; Wong, C. C. In Proceedings of the 1998 SPIE Conference on Micromachining and Microfabricaion Process Technology IV; SPIE Press: Bellingham, WA; p 262.
10. Frye-Mason, G.; Kottenstette, R. J.; Lewis, P. R.; Heller, E. J.; Manginell, R. P.; Adkins, D. R.; Dullock, D.; Martinez, D.; Sasaki, D.; Mowry, C.; Matzke, C.; Anderson, L. In Proceedings of Micro Total Analysis Systems 2000; Kluwer Academic Publishers: Dordrecht, The Netherlands, 2000; p 229.
11. Zellers, E. T.; Steinecker, W. H.; Lambertus, G. R.; Agah, M.; Lu, C.-J.; Chan, H. K. L.; Potkay, J. A.; Oborny, M. C.; Nichols, J. M.; Astle, A.; Kim, H. S.; Rowe, M. P.; Kim, J.; Da Silva, L. W.; Zheng, J.; Whiting, J. J.; Sacks, R. D.; Pang, S. W.; Kaviany, M.; Bergstrom, P. L.; Matzger, A. J.; Kurdak, C.; Bernal, L. P.; Najafi, K.; Wise, K. D. A versatile MEMS gas chromatograph for environmental vapor mixture analysis. In Proceedings Solid-State Sensor, Actuator, and Microsystems Workshop; IEEE Press: Piscataway, NJ, 2004; pp 61-66.
12. Potkay, J. A.; Driscoll, J. A.; Agah, M.; Sacks, R. D.; Wise, K. D. In Proceedings of the 16th Annual IEE Conference on Micro-Electro- Mechanical Systems (MEMS); Institution of Engineering and Technology: London, 2003; p 395.
13. Agah, M.; Potkay, J.; Elstro, A.; Lambertus, G.; Sacks, R.; Wise, K. A high performance temperature-programmed gas chromatography column. In North American Solid-State Sensors, Actuators, and Microsystems Workshop; IEEE Press: Piscataway, NJ, 2004; pp 302-305.
14. Agah, M.; Potkay, J. A.; Driscoll, J. A.; Sacks, R. D.; Kaviany, M.; Wise, K. D. Thermal Behavior of High-Performance Temperature-Programmed Microfabricated Gas Chromatography Columns. In Technical Digest of the 12th International Conference of Solid-State Sensors, Actuators and Microsystems; IEEE Press: Piscataway, NJ, 2003; pp 1339-1342.
15. Agah, M.; Potkay, J. A.; Lambertus, G. R.; Sacks, R. D.; Wise, K. D. High-Performance Temperature-Programmed Microfabricated Gas Chromatography Columns. IEEE J. Microelectromech. Syst. 2005, 14 (5), 1039-1050.
16. Lambertus, G. R.; Elstro, A.; Sensenig, K.; Potkay, J.; Agah, M.; Scheuering, S.; Wise, K. D.; Dorman, F.; Sacks, R. Anal. Chem. 2004, 76, 2629.
17. Reidy, S.; Lambertus, G.; Reece, J.; Sacks, R. D. Anal. Chem. 2006, 78 (8), 2623.
18. Grob, K. Making and Manipulating Capillary Columns for Gas Chromatography; Dr. Alfred Huthig Verlag: Heidelberg, Germany, 1986.
19. Lambertus, G. R.; Sacks, R. D. Anal. Chem. 2005, 77, 2078
20. Veriotti, T.; Sacks, R. Anal. Chem. 2001, 73, 3045.
21. Veriotti, T.; Sacks, R. Anal. Chem. 2001, 73, 4395.
22. Veriotti, T.; McGuigan, M.; Sacks, R. Anal. Chem. 2001, 73, 279.
23. Whiting, J.; Sacks, R. Anal. Chem. 2003, 75, 2215.
24. Grail, A. J.; Zellers, E. T.; Sacks, R. D. Environ. Sci. Technol. 2001, 35, 163.
25. Lu, C.-J.; Whiting, J. J.; Sacks, R. D.; Zellers, E. T. Anal. Chem. 2003, 75, 1400.
26. Lambertus, G. R.; Fix, C. S.; Reidy, S. M.; Miller, R.; Wheeler, D.; Nazarov, E.; Sacks, R. D. Anal. Chem. 2005, 77, 7563.
27. Ciucanu, I.; Chiriac, A. J. Sep. Sci. 2002, 25 (7), 247.
28. Segal, A.; Gorecki, T.; Mussche, P.; Lips. J.; Pawliszyn, J. J. Chromatogr. A 2000, 873 (1), 13.
29. Whalley, L. K.; Lewis, A. C.; McQuaid, J. B. J. Environ. Monit. 2004, 6 (3), (234)
30. Noh, H.; Hesketh, P.; Frye-Mason, G. IEEE MEMS 2002, 73.
31. Noh, H.; Hesketh, P.; Frye-Mason, G. J. Mkroelectromech. Syst. 2002, 11, 718.