Study of positive column of glow discharge in nitrogen by optical emission spectroscopy and numerical simulation

Plasma Sources Science and Technology

Volumn 18, Issue 2, 2009, Pages

  Cicala, G ^a   De Tommaso, E ^a   Raino A C ^b   Lebedev, Yu A ^c   Shakhatov, V A ^c  

^a CNR Consiglio Nazionale delle Ricerche   (Italy)

^b UNIVERSITY OF BARI   (Italy)

^c TOPCHIEV INSTITUTE OF PETROCHEMICAL SYNTHESIS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

AXIAL POSITIONS; COLLISIONAL RADIATIVE MODEL; CONSTANT PRESSURES; DC DISCHARGES; DISCHARGE CURRENTS; EMISSION SPECTRUMS; EXCITED SPECIES; MAIN PROCESS; NITROGEN EMISSIONS; NITROGEN MOLECULE; NUMERICAL SIMULATION; POSITIVE COLUMN; RADIATIVE PROCESS; ROTATIONAL TEMPERATURE; SEMI-EMPIRICAL; TRANSLATIONAL TEMPERATURE; VIBRATIONAL DISTRIBUTION; VIBRATIONAL TEMPERATURE;

ATOMIC SPECTROSCOPY; DATA PROCESSING; DIAMOND FILMS; DISTRIBUTION FUNCTIONS; GLOW DISCHARGES; LIGHT EMISSION; MOLECULAR SPECTROSCOPY; NITROGEN; OPTICAL EMISSION SPECTROSCOPY; PHOTORESISTS; PLASMAS; SPECTRUM ANALYSIS;

EMISSION SPECTROSCOPY;

EID: 67649833718     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/18/2/025032     Document Type: Article

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