On the nonlinear-flexural response of piezoelectrically driven microcantilever sensors

Sensors and Actuators, A: Physical

Volumn 153, Issue 2, 2009, Pages 171-179

  Mahmoodi, S Nima ^a   Daqaq, Mohammed F ^b   Jalili, Nader ^b  

^a Virginia Polytechnic Institute and State University   (United States)

^b Clemson University   (United States)

Author keywords

Microcantilvever sensors; Nonlinear response; Piezoelectric layer

Indexed keywords

ASYMPTOTIC BEHAVIORS; COMPARATIVE STUDIES; COMPREHENSIVE ANALYSIS; DESIGN AND DEVELOPMENT; FLEXURAL RESPONSE; GEOMETRIC AND MATERIAL NONLINEARITIES; MATERIAL NON-LINEARITY; METHOD OF MULTIPLE SCALE; MICRO CANTILEVER SENSORS; MICROCANTILVEVER SENSORS; NON-LINEAR MODEL; NON-LINEARITY; NONLINEAR BEHAVIOR; NONLINEAR MODELING; NONLINEAR RELATIONS; NONLINEAR RESPONSE; PIEZOELECTRIC LAYER; PIEZOELECTRIC LAYERS; PIEZOELECTRIC STACK; SOFTENING BEHAVIOR; STRESS AND STRAIN; THEORETICAL DEVELOPMENT; VIBRATION MODES; ZNO; ZNO LAYERS;

ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; HARDENING; MATERIALS; NONLINEAR CONTROL SYSTEMS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SEMICONDUCTING ZINC COMPOUNDS; ZINC OXIDE;

SENSORS;

EID: 67649418420     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.05.003     Document Type: Article

References (25)

1. Garcia N. Theory of scanning tunneling microscopy and spectroscopy: resolution, image and field states, and thin oxide layers. IBM Journal of Research and Development 30 5 (1986)
2. Binnig G., Quate C.F., and Gerber C. Atomic force microscope. Physical Review Letter 56 9 (1986)
3. Meyer G., and Amer N. Simultaneous measurement of lateral and normal forces with an optical-beam-deflection atomic force microscope. Applied Physics Letters 57 (1990) 2089
4. Ilic B., Yang Y., and Craighead H.G. Virus detection using nanoelectromechanical devices. Applied Physics Letters 85 13 (2004) 2604
5. Zhang J., and Feng H. Antibody-immobilized microcantilever for the detection of Escherichia coli. Analytical Sciences 20 (2004) 585
6. Gupta A., Akin D., and Bashir A. Detection of bacterial cells and antibodies using surface micromachined thin silicon cantilever resonators. Journal of Vacuum Science and Technology 32 4 (2004) 2785-2791
7. Su M., Li S., and Dravid V.P. Microcantilever resonance-based DNA detection with nanoparticle probes. Applied Physics Letters 82 20 (2003) 3562
8. Itoh T., and Suga T. Scanning force microscopy using a piezoelectric microcantilever. Journal of Vacuum Science and Technology B-Microelectronics and Nanometer Structures 12 (1994) 1581
9. Lee C., Itoh T., and Suga T. Self-excited piezoelectric PZT microcantilevers for dynamic SFM-with inherent sensing and actuating capabilities. Sensors and Actuators A 72 (1999) 179
10. Sharos L.B., Raman A., Grittenden A., and Reifenbereger R. Enhanced mass sensing using torsional and lateral resonances in microcantilevers. Applied Physics Letters 84 (2004) 4638
11. Crespo da Silva M.R.M., and Glynn C.C. Nonlinear flexural-flexural-torsional dynamics of inextensional beams: I. Equations of motion. Journal of Structural Mechanics 6 (1978) 437
12. Crespo da Silva M.R.M. Equations for nonlinear analysis of 3D motions of beams. Applied Mechanics Review 44 (1991) s51
13. Nayfeh A.H., and Nayfeh S.A. On non-linear modes of continuous systems. Journal of Vibration and Acoustics 166 (1994) 129
14. Nayfeh A.H. Nonlinear Dynamics (1995), Wiley, New Jersey, NJ
15. Mahmoodi S.N., Khadem S.E., and Rezaee M. Analysis of nonlinear mode shapes and natural frequencies of continuous damped systems. Journal of Sound and Vibration 275 (2004) 283
16. Arafat H.N., Nayfeh A.H., and Chin C. Nonlinear nonplanar dynamics of parametrically-excited cantilever beams. Nonlinear Dynamics 15 (1998) 31
17. Israelachvili J.N. Intermolecular and Surface Forces (1992), Academic Press, San Diego
18. Mahmoodi S.N., and Jalili N. Coupled torsional/bending nonlinear vibrations of microbeams. Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition (2006), ASME, Chicago, IL
19. Mahmoodi S.N., and Jalili N. Non-linear vibrations and frequency response analysis of piezoelectrically-driven microcantilevers. International Journal of Nonlinear Mechanics 42 (2007) 577
20. Guyomar D., Aurelle N., and Euraud L. Piezoelectric ceramics nonlinear behavior. Application to Langevin transducer. Journal De Physique III 7 (1997) 1197
21. Crawley E.F., and Lazarus K.B. Induced strain actuation of isotropic and anisotropic plates. Journal of Guidance and Control 29 (1991) 944
22. Nayfeh A.H., and Mook D.T. Nonlinear Oscillations (1979), Wiley-Interscience, New York
23. Polytech Inc., Micro System Analyzer Manual, MSA-400, Technical Brochure, Polytec Inc., www.polytec.com, 2005.
24. Meirovitch L. Fundamentals of Vibrations (2001), McGraw-Hill, New York, NY
25. Veeco, http://www.Veeco.com.