Three-dimensional tapered spot-size converter based on (111) silicon-on-insulator

IEEE Photonics Technology Letters

Volumn 21, Issue 12, 2009, Pages 820-822

  Fang, Na ^a   Yang, Zhifeng ^a   Wu, Aimin ^a   Chen, Jing ^a   Zhang, Miao ^a   Zou, Shichang ^a   Wang, Xi ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Anisotropic etching; Etching; Loss measurement; Optical fiber devices; Optical waveguides; Silicon; Silicon on insulator (SOI); Spot size converter (SSC); Surface treatment; Three dimensional displays

Indexed keywords

LOSS MEASUREMENT; OPTICAL FIBER DEVICES; SILICON-ON-INSULATOR (SOI); SPOT-SIZE CONVERTER (SSC); THREE DIMENSIONAL DISPLAYS;

ANISOTROPIC ETCHING; ANISOTROPY; INTEGRATED OPTOELECTRONICS; MICROSENSORS; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL MATERIALS; OPTICAL WAVEGUIDES; SURFACE TREATMENT; THREE DIMENSIONAL; WAVEGUIDES;

SILICON WAFERS;

EID: 67649300713     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2009.2019619     Document Type: Article

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