Fabrication of superhydrophilic nanostructured surface by thermal annealing of titanium thin films in air

Journal of Nanoscience and Nanotechnology

Volumn 9, Issue 2, 2009, Pages 1509-1513

  Klamchuen, A ^a   Pratontep, S ^b  

^a NATIONAL SCIENCE AND TECHNOLOGY DEVELOPMENT AGENCY   (Thailand)

^b NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER   (Thailand)

Author keywords

Dc magnetron sputtering; Superhydrophilicity.; Titanium oxynitride

Indexed keywords

ANNEALED FILMS; ANNEALING PROCESS; ANNEALING TEMPERATURES; CAPPING LAYER; CHEMICAL COMPOSITIONS; DC MAGNETRON SPUTTERING; GAS CONTROL; NANO SCALE; NANOSTRUCTURE MATERIAL; NANOSTRUCTURED SURFACE; OPTICAL ABSORPTION SPECTROSCOPY; PHOTOCATALYTIC COATING; POTENTIAL APPLICATIONS; SEMI-CONDUCTOR FABRICATION; SUPER-HYDROPHILIC; SUPERHYDROPHILICITY.; THERMAL-ANNEALING; TITANIUM COMPOSITES; TITANIUM METALS; TITANIUM OXYNITRIDE; TITANIUM THIN FILMS; VERSATILE METHODS; WATER CONTACT ANGLE; X RAY PHOTOEMISSION SPECTROSCOPY;

ANGLE MEASUREMENT; ANNEALING; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; COMPOSITE FILMS; CONTACT ANGLE; EMISSION SPECTROSCOPY; GAS ABSORPTION; MAGNETRONS; NANOSTRUCTURED MATERIALS; NITRIDES; OPTICAL MICROSCOPY; OXYGEN; SURFACES; TITANIUM; TRANSMISSION ELECTRON MICROSCOPY;

ABSORPTION SPECTROSCOPY;

EID: 67649294888     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2009.C190     Document Type: Conference Paper

References (11)

1. H. Y. Erbil, A. L. Demirel, Y. Avci, and O. Mert, Science 299, 1377 (2003).
2. T. Sun, L. Feng, X. Gao, and L. Jiang, Acc. Chem. Res. 38, 644 (2005).
3. Y.-Q. Hou, D. Zhuang, G. Zang, M. Zhao, and M.-S. Wu, Appl. Surf. Sci. 218, 97 (2003).
4. M.-S. Wong, H. P. Chou, and T.-S. Yang, Thin Solid Films 494, 244 (2006).
5. M.-C. Yang, T.-S. Yang, and M.-S. Wong, Thin Solid Films 469-470, 1 (2004).
6. M. J. Jung, K. H. Nam, Y. M. Chung, J. H. Boo, and J. G. Han Surf Coat. Technol. 171, 71(2003).
7. S. VenKataraj, D. Severin, S. H. Mohamed, J. Ngaruiya, O. Kappertz, and M. Wuttig, Thin Solid Films 502, 228 (2006).
8. M. Koufaki, M. Sifakis, E. Iliopoulos, N. Pelekanos, M. Modreanu, V. Cimalla, G. Ecke, and E. Aperathitis, Appl. Surf Sci. 253, 405 (2003).
9. A. Glaser, S. Sumev, F P. Netzer, N. Fateh, G. A. Fontavol, and C. Mitterer, Surf Sci. 601, 1153 (2007).
10. F. Vaza, P. Cerqueira, L. Rebouta, S. M. C. Nascimento, E. Alves, P. Goudeau, J. P. Riviere, K. Pischow, and J. de Rijk, Thin Solid Fibns 447-448, 449 (2004).
11. Y. L. Jeyachandran, Sa. K. Narayandass, D. Mangalaraj, S. Areva, and J. A. Mielczarski, Mater Sci. Eng. A 431, 277 (2006).