New methods for the study and fabrication of nano-structured materials using FIB SEM

Journal of Nanoscience and Nanotechnology

Volumn 9, Issue 2, 2009, Pages 1268-1271

  Stokes, Debbie J ^a   Wilhelmi, Oliver ^a   Reyntjens, Steve ^a   Jiao, Chengge ^a   Roussel, Laurent ^a  

^a Thermo Fisher Scientific   (United States)

Author keywords

Insulators.; Nanofabrication; S TEM Specimen preparation

Indexed keywords

BULK MATERIALS; CHARACTERISATION; CHEMICAL VAPOUR DEPOSITION; CRITICAL DIMENSION; DIMENSIONAL REPRESENTATION; FIB SEM; FOCUSED ION BEAM TECHNOLOGY; HIGH QUALITY; INSULATORS.; NANO SCALE; NANO-STRUCTURED; NANOFABRICATION; S/TEM SPECIMEN PREPARATION; SCANNING TRANSMISSION ELECTRON MICROSCOPES; SEM; SEQUENTIAL IMAGES; SITE-SPECIFIC; SOFT MATERIAL; SPATIAL RELATIONSHIPS; TRANSMISSION ELECTRON MICROSCOPE; TWO-DIMENSIONAL IMAGES; ULTRA-MICROTOMY; ULTRA-THIN;

ELECTRON MICROSCOPES; ELECTRONS; FOCUSED ION BEAMS; NANOLITHOGRAPHY; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; OBJECT RECOGNITION; SCANNING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR QUANTUM WIRES; TRANSMISSION ELECTRON MICROSCOPY;

SPECIMEN PREPARATION;

EID: 67649261722     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2009.C135     Document Type: Conference Paper

References (5)

1. O. Wilhelmi, S. Reyntjens, L. Roussel, D. J. Stokes, and D. H. W. Hubert, High Resolution Nanolithography Using Focused Ion Beam Scanning Electron Microscopy (FIB SEM). (Manuscript in preparation.)
2. F. Morrissey, S. Reyntjens, K. Nakahara, and C. Jiao, Microsc. Microanal. 1 1(Suppl 2), 462 (2005).
3. p. A. Anzalone, J. F. Mansfield, and L. A. Giannuzzi, Microsc. Microanal. 10(Suppl 2), 1154 (2004).
4. L. A. Giannuzzi, R. Guerts, and J. Ringnalda, Microsc. Microanal. I 1(Suppl 2), 828 (2005).
5. D. J. Stokes, T. Vystavel, and F Morrissey, J. Phys. D. Appl. Phys. 40, 874 (2007).