Characterization of zno thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of zno by metal organic chemical vapor deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7217, Issue , 2009, Pages

  Rogers, D J ^a   Teherani, F Hosseini ^a   Sartel, C ^b   Sallet, V ^b   Jomard, F ^b   Galtier, P ^b   Razeghi, M ^c  

^a 8 Route de Chevreuse France   (France)

^b LABORATOIRE DES SCIENCES DU CLIMAT ET DE L ENVIRONNEMENT   (France)

^c NORTHWESTERN UNIVERSITY   (United States)

Author keywords

MOCVD; PLD; Regrowth; Template; Zno

Indexed keywords

MOCVD; PLD; REGROWTH; TEMPLATE; ZNO;

CORUNDUM; INDUSTRIAL CHEMICALS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTICAL PROPERTIES; ORGANIC CHEMICALS; ORGANOMETALLICS; PROGRAMMABLE LOGIC CONTROLLERS; PULSED LASER DEPOSITION; SAPPHIRE; SEMICONDUCTING ZINC COMPOUNDS; VAPORS; ZINC;

ZINC OXIDE;

EID: 67649197749     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.817032     Document Type: Conference Paper

References (7)

1. C. Klingshirn, Chem. Phys. Chem. 8 (2007) 782-803
2. V. Sallet, C. Thiandoume, J.F. Rommeluere, A. Lusson, A. Riviere, J.P. Riviere, O. Gorochov, R. Triboulet, V. Munoz-Sanjose, Materials Letters 53 (2002) 126-131
3. K. Maeda, M. Sato, I. Niikura & T. Fukuda, Semicond. Sci. Technol. 20 (2005) S49-S54
4. C. Neumann, S. Lautenschlager, S. Graubner, J. Sann, N. Volbers, B. K. Meyer, J. Biasing, A. Krost, F. Bertram, J. Christen, Phys. Stat. Sol. 244, 5 (2006) 1451-1457
5. M. Lorenz Pulsed Laser Deposition of ZnO-based Thin Films chapter 7 in: K. Ellmer, A. Klein, B. Rech (eds.), "Transparent Conductive Zinc Oxide. Basics and Applications in Thin Film Solar Cells" (Springer Series in Materials Science Vol. 104, Berlin, 2007) 305-360
6. C. Sartel, V. Sallet, A. Lusson, N. Haneche, J. M. Laroche, P. Galtier, D. J. Rogers, F. Hosseini Teherani, submitted to J. Vac. Sci. Technol. (2009)
7. D. J. Rogers, F. Hosseini Téherani, A. Yasan, R. McClintock, K. Mayes, S. R. Darvish, P. Kung, M. Razeghi, and G. Garry, Proc. SPIE 5732 (2005) 412 d.j.rogers@nanovation.com