Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response

Microelectronic Engineering

Volumn 86, Issue 7-9, 2009, Pages 1936-1938

  Clima, S ^a   Pourtois, G ^a   Menou, N ^a   Popovici, M ^a   Rothschild, A ^a   Kaczer, B ^a   Van Elshocht, S ^a   Wang, X P ^a   Swerts, J ^a   Pierreux, D ^b   De Gendt, S ^a,c   Wouters, D J ^a   Kittl, J A ^a  

^a IMEC   (Belgium)

^b ASM BELGIUM   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Dielectric constant; Ruddlesden Popper phase; SrTiO3

Indexed keywords

BAND GAPS; DIELECTRIC CONSTANT; DIELECTRIC CONSTANTS; DIELECTRIC RESPONSE; EFFECTIVE CHARGE; FIRST-PRINCIPLES DENSITY FUNCTIONAL THEORY; MIM CAPACITORS; PHONON MODE; RUDDLESDEN-POPPER PHASE; SRTIO; SRTIO3; UPPER LIMITS;

CERAMIC CAPACITORS; DENSITY FUNCTIONAL THEORY; DIELECTRIC WAVEGUIDES; MIM DEVICES; PERMITTIVITY; STRONTIUM COMPOUNDS;

STRONTIUM ALLOYS;

EID: 67349279122     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.03.029     Document Type: Article

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