Porous silicon membrane, with an integrated aqueous supply, for two chamber AFM

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 1393-1395

  Thibault, Christophe ^a   Carcenac, Franck ^a   Dague, Etienne ^a   Chalmeau, Jérome ^a   Vieu, Christophe ^a  

^a UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

Chemical etching; Membrane; Microfluidic; SOI; Two chambers AFM

Indexed keywords

AFM IMAGING; AQUEOUS SOLUTIONS; ATOMIC-FORCE MICROSCOPIES; BILAYER MEMBRANES; CHEMICAL CHANGES; CHEMICAL ETCHING; DENATURATION PROCESS; LIPIDIC MEMBRANES; MEMBRANE PROTEINS; MICA SURFACES; MICRO-FLUIDIC DEVICES; NANO-HOLES; NATIVE CONFIGURATIONS; SILICON MEMBRANES; SILICON PROCESS; SOI; TRANSMEMBRANE STRUCTURES; TWO CHAMBERS AFM;

ETCHING; MEMBRANES; MICA; POROUS SILICON; PROTEINS; SILICATE MINERALS;

ATOMIC FORCE MICROSCOPY;

EID: 67349263383     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.11.068     Document Type: Article

References (4)

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