Interferential lithography of 1D thin metallic sinusoidal gratings: Accurate control of the profile for azimuthal angular dependent plasmonic effects and applications

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 573-576

  Romanato, Filippo ^a,b,c   Kang, Husen Kartasasmita ^a   Lee, Kwang Hong ^a   Ruffato, Gianluca ^b   Prasciolu, Mauro ^c   Wong, Chee Cheong ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b UNIVERSITY OF PADOVA   (Italy)

^c LABORATORIO TASC   (Italy)

Author keywords

Gratings; Interference lithography; Plasmonic crystals; Simulation

Indexed keywords

AMPLITUDE OSCILLATIONS; AZIMUTHAL ANGLES; BI LAYERS; BIO-SENSING; CONTRAST STUDIES; CONTROL OF THE PROFILES; DIFFRACTED EFFICIENCIES; FILM THICKNESS; GRATINGS; INTERFERENCE LITHOGRAPHY; METALLIC GRATINGS; METALLIC LAYERS; NON-LINEAR PROCESS; NUMERICAL MODELS; OPTICAL COUPLINGS; OPTIMIZATION PROCESS; PLASMONIC CRYSTALS; ROUGHNESS SURFACES; SIMULATION; SINUSOIDAL GRATINGS; SINUSOIDAL SURFACES; SPECIFIC HARMONICS; SPECULAR REFLECTIVITIES; SURFACE PLASMON POLARITONS;

CRYSTALS; DIFFRACTION GRATINGS; PHOTOLITHOGRAPHY; PLASMONS; REFLECTION; SURFACE PLASMON RESONANCE; SURFACE ROUGHNESS;

SILVER;

EID: 67349260425     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.01.080     Document Type: Article

References (15)

1. Raether H. Physics of Thin Film 9 (1977) 145-261
2. Chen Z., Hooper I.R., and Sambles J.R. Journal of Optics A: Pure and Applied Optics 10 1 (2008) 015007
3. Romanato F., Hong L.K., Kang H.K., Wong C.C., Yun Z., and Knoll W. Physical Review B 77 (2008) 245435
4. Kretschmann E., and Raether H. Zeitschrift für Naturforschung-Teil A: Physik, Physikalische Chemie, Kosmophysik 23 (1963) 2135-2136
5. Raether H. Surface Plasmons on Smooth and Rough Surfaces and on Gratings (1988), Springer-Verlag, Berlin
6. Ward A.J., and Pendry J.B. Journal of Modern Optics 43 4 (1996) 773-793
7. Petit R. Electromagnetic Theory of Gratings (1980), Springer
8. Guo H.C., Nau D., Radke A., Zhang X.P., Stodolka J., Yang X.L., Tikhodeev S.G., Gippius N.A., and Giessen H. Applied Physics B 81 2-3 (2005)
9. Farhoud M., Ferrera J., Lochtefeld A.J., Murphy T.E., Schattenburg M.L., Carter J., Ross C.A., and Smith H.I. Journal Vacuum Science and Technology B 17 6 (1999) 3182
10. O'Reilly T.B., and Smith H.I. Journal Vacuum Science and Technology B 26 6 (2008) 2131-2134
11. Ong B.H., Yuan X., and Tjin S.C. Fiber and Integrated Optics 26 4 (2007) 229-240
12. J.A. Woollam Co., I., Spectroscopic Ellipsometry-Data Acquisition and Analysis in A Guide to use WVASE 32. 2006.
13. Bryan-Brown G.P., Jory M.C., Elston S.J., and Sambles J.R. Journal of Modern Optics 40 5 (1993) 959-964
14. Chandezon J., Raoult G., and Maystre D. Journal of Optics-Nouvelle Revue D Optique 11 4 (1980) 235-241
15. G. Ruffato, Surface Plasmon Polaritons on 1D-Gratings, in: Department of Physics, University of Padova, Padova, 2008, p. 83.