Microstructure and deposition mechanism of CVD amorphous boron carbide coatings deposited on SiC substrates at low temperature

Ceramics International

Volumn 35, Issue 5, 2009, Pages 1877-1882

  Zeng, Bin ^a   Feng, Zude ^a   Li, Siwei ^a   Liu, Yongsheng ^b   Cheng, Laifei ^b   Zhang, Litong ^b  

^a XIAMEN UNIVERSITY   (China)

^b NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

Boron carbide coating; CVD; Deposition mechanism; Microstructure

Indexed keywords

AMORPHOUS BORONS; BORON CARBIDE COATING; BORON CONTENTS; CVD; DEPOSITED COATINGS; DEPOSITION MECHANISM; DEPOSITION TEMPERATURES; ENERGY DISPERSIVE X-RAY SPECTROSCOPIES; FREE CARBONS; INTERNAL STRUCTURES; LOW TEMPERATURES; MICRO-RAMAN SPECTROSCOPIES; REDUCED PRESSURES; SEM; SIC SUBSTRATES; X-RAY DIFFRACTIONS; X-RAY PHOTOELECTRON SPECTROSCOPIES;

BORON; BORON CARBIDE; CHEMICAL ANALYSIS; COATINGS; ELECTRODEPOSITION; MICROSTRUCTURE; NONMETALS; PHASE COMPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; SPECTRUM ANALYSIS; SUBSTRATES; THERMAL EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL VAPOR DEPOSITION;

EID: 67349234203     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2008.10.020     Document Type: Article

References (23)

1. Quemard L., Rebillat F., Guette A., Tawil H., and Louchet-Pouillerie C. Self-healing mechanisms of a SiC fiber reinforced multi-layered ceramic matrix composite in high pressure steam environments. J. Eur. Ceram. Soc. 27 (2007) 2085-2094
2. Jansson U., Carlsson J.O., Stridh B., Soderberg S., and Olson M. Chemical vapor deposition of boron carbides I: phase and chemical composition. Thin Solid Films 172 (1989) 81-93
3. Jasson U., and Carlsson J.O. Chemical vapor deposition of boron carbides in the temperature range 1300-1500 K and at a reduced pressure. Thin Solid Films 124 (1985) 101-107
4. 2-argon mixtures. J. Am. Chem. Soc. 81 (1998) 3077-3086
5. Vandenbulcke L., Herbin R., Basutcu M., and Barrandon J.N. Étude expérimentale du dépôt chimique du carbure de bore àpartir de mélanges trichlorure de bore, méthane et hydrogène. J. Less-Common Metals 80 (1981) 7-22
6. Vandenbulcke L. Theoretical and experimental studies on the chemical vapor deposition of boron carbide. Ind. Eng. Chem. Process Des. Dev. 24 (1985) 568-575
7. Dilek S.N., Ozbelge H.O., Sezgi N.A., and Dogu T. Kinetic studies for boron carbide formation in a dual impinging-jet reactor. Ind. Eng. Chem. Res. 40 (2001) 751-755
8. Langlais F. Chemical vapor infiltration processing of ceramic matrix composites. In: Kelly A., and Zweben C. (Eds). Comprehensive Composite Materials (2000), Pergamon Press, Oxford 611-644
9. Berjonneau J., Langlais F., and Chollon G. Understanding the CVD process of (Si)-B-C ceramics through FTIR spectroscopy gas phase analysis. Surf. Coat. Technol. 201 (2007) 7273-7285
10. Hannache H., Langlais F., and Naslain R. Kinetics of boron carbide chemical vapor deposition and infiltration. In: Carlsson J.O., and Lindström J. (Eds). Proceedings of the 5th European Conference on CVD. Uppsala, Sweden (1985) 219-233
11. 2 precursor. J. Electrochem. Soc. 153 (2006) C795-C800
12. M. Olsson, U. Jansson, B. Stridh, S. Soederberg, J.O. Carlsson, Mechanical and tribological properties of chemical vapour deposition boron carbide coatings, Proceedings of the 3rd International Conference on the Science of Hard Materials, Nassau, Bahamas, 1987, in Mater. Sci. Eng. A 105-106 (1988) 453-463.
13. Karaman M., Özbelge H.O., Sezgi N.A., and Dogu T. Mechanism and characterization studies on boron carbides deposited by chemical vapor deposition technique. Mater. Res. Soc. Symp. Proc. 886 (2006) 0886-F11-11.1
14. 4C on tungsten substrate. AIChE J. 52 (2006) 4161-4166
15. Yan X.Q., Li W.J., Goto T., and Chen M.W. Raman spectroscopy of pressure-induced amorphous boron carbide. Appl. Phys. Lett. 88 (2006) 131905-1-131905-3
16. 4C boron carbide. Phys. Rev. Lett. 83 (1999) 3230-3233
17. Vast N., Baroni S., Zerah G., Besson J.M., Polian A., Chervin J.C., and Grimsditch T. Lattice dynamics of icosahedral α-boron under pressure. Phys. Rev. Lett. 78 (1997) 693-696
18. Werheit H., Rotter H.W., Meyer F.D., Hillebrecht H., Shalamberidze S.O., Abzianidze T.G., and Esadze G.G. FT-Raman spectra of isotope-enriched boron carbide. J. Solid State Chem. 177 (2004) 569-574
19. Kokai F., Taniwaki M., Ishihara M., and Koga Y. Effect of laser fluence on the deposition and hardness of boron carbide thin films. Appl. Phys. A 74 (2002) 533-536
20. 4C coated carbon fibers. Carbon 37 (1999) 129-145
21. 4C boron carbide. Comput. Mater. Sci. 17 (2000) 127-132
22. Ducarroir M., and Bernard C. Thermodynamic domains of the various solid deposits in the B-C-H-CI vapor system. J. Electrochem. Soc. 123 (1976) 136-140
23. The NIST Chemistry WebBook, http://webbook.nist.gov/chemistry/.