Understanding the CVD process of (Si)-B-C ceramics through FTIR spectroscopy gas phase analysis

Surface and Coatings Technology

Volumn 201, Issue 16-17, 2007, Pages 7273-7285

  Berjonneau, J ^a   Langlais, F ^a   Chollon, G ^a  

^a DIF   (France)

Author keywords

(Si) B C; CVD; FTIR; Gas phase analysis

Indexed keywords

CERAMIC COATINGS; CHEMICAL BONDS; HYDROCARBONS; NANOCRYSTALS; REACTION KINETICS; SILICON CARBIDE;

CHLOROSILANES; GAS PHASE ANALYSIS;

CHEMICAL VAPOR DEPOSITION;

CERAMIC COATINGS; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; HYDROCARBONS; NANOCRYSTALS; REACTION KINETICS; SILICON CARBIDE;

EID: 34047269108     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.01.039     Document Type: Article

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