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Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

Improvement of hardness and toughness of TiAlN coating by nanoscale multilayered structurization with Si3N4

(4) Park, Jong Keuk a Ziebert, Carlos b Stüber, Michael b Baik, Young Joon a

a Korea Institute of Science and Technology (South Korea)

b KARLSRUHE INSTITUTE OF TECHNOLOGY (Germany)

Author keywords

Hardness; Nanolayers; Silicon nitride; Titanium aluminum nitride; Toughness

Indexed keywords

HIGH HARDNESS; HIGH HARDNESS AND TOUGHNESS; LAYER THICKNESS; MULTI-LAYERED; MULTILAYERED COATINGS; NANO SCALE; NANOLAYERS; NITRIDE COATING; SI-BASED; STRUCTURIZATION; TIALN COATINGS; TITANIUM ALUMINUM NITRIDE;

ALUMINA; ALUMINUM; ALUMINUM NITRIDE; COATINGS; HARDNESS; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; SILICON; SILICON NITRIDE; TITANIUM; TITANIUM NITRIDE;

MICROCRYSTALLINE SILICON;

EID: 67349226031 PISSN: 16128850 EISSN: 16128869 Source Type: Journal
DOI: 10.1002/ppap.200732202 Document Type: Conference Paper

Times cited : (15)

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