Bi-directional movable latched micromechanism using one-directional movable Chevron electrothermal actuators for switch and relay applications

Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003

Volumn , Issue , 2003, Pages 180-181

  Chen, Wen Chih ^a   Wu, Chia Yu ^a   Lee, Chengkuo ^a  

^a ASIA PACIFIC MICROSYSTEMS INC   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATORS;

BI-DIRECTIONAL; BISTABLES; ELECTRO-THERMAL ACTUATORS; MECHANICALLY STABLE; MICRO MECHANISMS; MICRO-ELECTRO-MECHANICAL; RELATIVE POSITIONS;

NANOTECHNOLOGY;

EID: 67349209782     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMNC.2003.1268634     Document Type: Conference Paper

References (5)

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