MEMS scanning calorimeter with serpentine-shaped platinum resistors for characterizations of microsamples

Journal of Microelectromechanical Systems

Volumn 18, Issue 2, 2009, Pages 414-423

  Youssef, Sami ^a   Podlecki, Jean ^a   Al Asmar, Roy ^b   Sorli, Brice ^a   Cyril, Oliver ^a   Foucaran, Alain ^a  

^a UNIV MONTPELLIER   (France)

^b HOLY SPIRIT UNIVERSITY OF KASLIK USEK   (Lebanon)

Author keywords

Calorimetry; Heat capacity; Microelectromechanical systems (MEMS)

Indexed keywords

CONDUCTION MODES; DIFFERENTIAL SCANNING CALORIMETERS; DSC MEASUREMENTS; FEM CALCULATIONS; HEAT CAPACITY; HEAT OF VAPORIZATIONS; HIGH UNIFORMITIES; LIQUID SAMPLES; MEMS DESIGNS; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROSAMPLES; NANO LITERS; NEW DESIGNS; PLATINUM RESISTORS; RESISTIVE HEATERS; SELF ALIGNMENTS; SENSING AREAS; SIDE WALLS; SILICON NITRIDE MEMBRANES; TEMPERATURE FIELDS; THERMAL ISOLATIONS; WATER DROPLETS;

CALORIMETERS; CELL MEMBRANES; DIFFERENTIAL SCANNING CALORIMETRY; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; PLATINUM; SCANNING; SEMICONDUCTING SILICON COMPOUNDS; SERPENTINE; SILICATE MINERALS; SILICON NITRIDE; SILICON WAFERS; SPECIFIC HEAT; TEMPERATURE MEASURING INSTRUMENTS; WATER VAPOR;

COMPOSITE MICROMECHANICS;

EID: 67349203555     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2013392     Document Type: Article

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