Atomic-scale redistribution of Pt during reactive diffusion in Ni (5% Pt)-Si contacts

Ultramicroscopy

Volumn 109, Issue 7, 2009, Pages 797-801

  Cojocaru Miredin O ^a   Cadel, E ^a   Blavette, D ^a   Mangelinck, D ^b   Hoummada, K ^b   Genevois, C ^a   Deconihout, B ^a  

^a UNIVERSITÉ DE ROUEN   (France)

^b AIX MARSEILLE UNIVERSITY   (France)

Author keywords

Laser atom probe tomography; Microelectronics; NiSi; Silicides

Indexed keywords

ACTIVE REGIONS; IN-SITU; LASER-ASSISTED; LOW RESISTIVITIES; NANO-TRANSISTORS; NI FILMS; NISI; REACTIVE DIFFUSIONS; TOMOGRAPHIC ATOM PROBES;

AGGLOMERATION; ATOMS; LASERS; MICROELECTRONICS; NICKEL; NICKEL COMPOUNDS; PLATINUM; PROBES; SILICIDES; SILICON; TOMOGRAPHY; X RAY DIFFRACTION;

PHASE INTERFACES;

NANOPARTICLE; NICKEL; PLATINUM; SILICON;

ARTICLE; DIFFUSION; POLYMERIZATION; TOMOGRAPHY; VACUUM; X RAY DIFFRACTION;

EID: 67349194308     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2009.02.001     Document Type: Article

References (23)

1. d'Heurle F.M., and Gas P. J. Mater. Res. 1 (1986) 205-221
2. d'Heurle F.M. J. Mater. Res. 3 (1988) 167
3. Mangelinck D., Dai J.Y., Pan J., and Lahiri S.K. Appl. Phys. Lett. 75 (1999) 1736
4. Lee P.S., Pey K.L., Mangelinck D., Ding J., Wee A.S.T., and Chan L. IEEE Electron Dev. Lett. 22 (2001) 568
5. Lavoie C., Detavernier Jr. C., Cabral C., d'Heurle F.M., Kellock A.J., Jordan-Sweet J., and Harper J.M.E. Microelectron. Eng. 83 (2006) 2042
6. Kellogg G.L., and Tsong T.T. J. Appl. Phys. 51 2 (1980) 1184-1193
7. Tsong T.T., McLane S.B., and Kinkus T. Rev. Sci. Instrum. 53 9 (1982) 1442-1448
8. Deconihout B., Vurpillot F., Gault B., Da costa G., Bouet M., Bostel A., Hideur A., Martel G., Brunel M., and Blavette D. Surf. Interface Anal. 38 (2006)
9. Gault B., Vurpillot F., Gilbert M., Vella A., Menand A., Blavette D., and Deconihout B. Rev. Sci. Instrum. 77 (2006) 043705
10. Thompson K., Bunton J.H., Kelly Th., and Larson D.J. J. Vac. Sci. Technol. B 24 (2006) 421
11. Hoummada K., Cadel E., Mangelinck D., Perrin C., Deconihout B., and Blavette D. Appl. Phys. Lett. 89 (2006) 181905
12. Cojocaru-Miredin O., Mangelinck D., Hoummada K., Cadel E., Blavette D., Deconihout B., and Perrin-Pellegrino C. Scr. Mater. 57 (2007) 373-376
13. Gross M., Haaga S., Fietzek H., Herrmann M., and Engel W. Mater. Sci. Forum 278-281 (1998) 242-247
14. Mangelinck D., Hoummada K., Cojocaru-Mirédin O., Cadel E., Perrin-Pellegrino C., and Blavette D. Microelectron. Eng. (2008)
15. R. Stull, G.C. Sinke, Thermodynamic Properties of the Elements Vol. 18, American Chemical Society, Washington, D.C., 1956.
16. Clevenger L.A., and Thompson C.V. J. Appl. Phys. 67 (1990) 1325
17. Gösele U., and Tu K.N. J. Appl. Phys. 66 (1989) 2621
18. Ma E., Meng W.J., Johnson W.L., and Nicolet M.-A. Appl. Phys. Lett. 53 (1988) 2033
19. Nemouchi F., Mangelinck D., Bergam C., and Gas P. Appl. Phys. Lett. 86 (2005) 041903
20. Ciccariello J.C., Poise S., and Gas P. J. Appl. Phys. 67 (1990) 3315
21. Zimmermann H., and Ryssel H. Appl. Phys. A 55 (1992) 121
22. Finstad T.G. Phys. Status Solidi A 63 (1981) 223
23. Mangelinck D., Dai J.Y., Lahiri S.K., Ho C.S., and Osipowicz T. Mater. Res. Soc. 564 (1999) 163