Development of liquid pumping devices using vibrating microchannel walls

Sensors and Actuators, A: Physical

Volumn 152, Issue 2, 2009, Pages 211-218

  Ogawa, Junya ^a   Kanno, Isaku ^a   Kotera, Hidetoshi ^a   Wasa, Kiyotaka ^a   Suzuki, Takaaki ^b  

^a KYOTO UNIVERSITY   (Japan)

^b KAGAWA UNIVERSITY   (Japan)

Author keywords

TAS; Micropump; Piezoelectric; PZT thin films; Traveling wave

Indexed keywords

CHANNEL WALL; DEEP REACTIVE ION ETCHING; DISPLACEMENT PROFILES; DISPLACEMENT REDUCTION; LASER DOPPLER VIBROMETER; LIQUID FLOW; LIQUID PUMPING; MAXIMUM DISPLACEMENT; MEAN FLOW VELOCITIES; MICRO FLUIDIC SYSTEM; MICROCHANNEL WALLS; MICROPUMP; PB(ZR ,TI)O; PIEZOELECTRIC; PZT; PZT THIN FILM; PZT THIN FILMS; RESONANT FREQUENCIES; SILICON-ON-INSULATOR SUBSTRATES; THIN FILM ACTUATOR; TRAVELING WAVE; VALVELESS PUMPING;

CHANNEL FLOW; FREQUENCY RESPONSE; LEAD; LIQUIDS; NATURAL FREQUENCIES; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; PLATES (STRUCTURAL COMPONENTS); PUMPS; REACTIVE ION ETCHING; SEMICONDUCTING LEAD COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; THIN FILMS; ZIRCONIUM;

MICROCHANNELS;

EID: 67349171566     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.04.004     Document Type: Article

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