Application of visual servo-control X-Y table in color filter cross mark alignment

Sensors and Actuators, A: Physical

Volumn 152, Issue 1, 2009, Pages 53-62

  Huang, Shiuh Jer ^a,b   Lin, Shu Yi ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Color filter cross mark alignment and vision servo control; Intelligent control; Micro positioning servomechanism

Indexed keywords

AC SERVO MOTORS; BALL SCREWS; COLOR FILTER CROSS MARK ALIGNMENT AND VISION SERVO CONTROL; INTELLIGENT MODELS; MACHINE VISION SYSTEMS; MECHATRONICS SYSTEMS; MICRO-NANO; MICRO-POSITIONING SERVOMECHANISM; OPTICAL INSPECTIONS; PC-BASED CONTROLS; POSITIONING PERFORMANCE; SERVO CONTROLLERS; SERVO SYSTEMS; STEADY STATE ACCURACIES; STEP CHANGES; TRANSIENT RESPONSE; VISION INFORMATIONS; VISUAL SERVOS; X-Y TABLES;

AC MOTORS; ALIGNMENT; APPLICATIONS; COLOR; COMPUTER VISION; INTELLIGENT CONTROL; MOTION CONTROL; MOTION PLANNING; OPTICAL TESTING; PNEUMATIC CONTROL EQUIPMENT; SERVOMOTORS; YTTRIUM ALLOYS;

CONTROLLERS;

EID: 67349171107     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.03.014     Document Type: Article

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