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Volumn 51, Issue 1, 2009, Pages 112-118
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Novel water based cerium acetate precursor solution for the deposition of epitaxial cerium oxide films as HTSC buffers
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Author keywords
CeO2 buffer layers; EDTA; Sol gel; Species distribution simulation; Thin films; Water based
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Indexed keywords
CEO2 BUFFER LAYERS;
CERIUM ACETATE;
CERIUM OXIDES;
DWELL TIME;
EDTA;
ETHYLENE DIAMINE;
ETHYLENE DIAMINE TETRA-ACETIC ACID;
GAS PROCESSING;
OPTIMAL GROWTH;
POLE FIGURE;
PRECURSOR SOLUTIONS;
SEM;
SOLUTION CONCENTRATION;
SPECIES DISTRIBUTION SIMULATION;
WATER BASED;
ACETIC ACID;
ACIDS;
BUFFER LAYERS;
CERIUM;
CERIUM COMPOUNDS;
EPITAXIAL FILMS;
GELATION;
GELS;
METAL ANALYSIS;
OXIDES;
PH EFFECTS;
SOL-GEL PROCESS;
SOL-GELS;
SOLS;
SPECTROSCOPIC ELLIPSOMETRY;
OXIDE FILMS;
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EID: 67349169248
PISSN: 09280707
EISSN: None
Source Type: Journal
DOI: 10.1007/s10971-009-1949-7 Document Type: Article |
Times cited : (15)
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References (14)
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