Atmospheric pressure microwave plasma fluidized bed CVD of AlN coatings

Surface and Coatings Technology

Volumn 203, Issue 20-21, 2009, Pages 3168-3172

  Pajkic, Zeljko ^a   Willert Porada, Monika ^a  

^a UNIVERSITY OF BAYREUTH   (Germany)

Author keywords

Aluminum nitride; Carbon; Microwave; Organometallic CVD; X ray diffraction

Indexed keywords

ALN; ALN COATINGS; FLUIDIZED BED CHEMICAL VAPOR DEPOSITION; FLUIDIZED-BED CVD; GHZ FREQUENCIES; HIGH TEMPERATURE; MICROWAVE PLASMA; NITROGEN PLASMAS; PARTICULATE SUBSTRATE; SHORT CARBON FIBERS; STARTING MATERIALS; TEMPERATURE RANGE; TRIMETHYLALUMINUM;

ALUMINA; ALUMINUM; ALUMINUM NITRIDE; ATMOSPHERIC CHEMISTRY; ATMOSPHERIC PRESSURE; CARBON FIBERS; CARBON NITRIDE; COATINGS; DECOMPOSITION; DIFFRACTION; FLUID DYNAMICS; FLUIDIZATION; FLUIDIZED BED PROCESS; FLUIDIZED BEDS; GRAFTING (CHEMICAL); MICROWAVES; ORGANOMETALLICS; OXIDATION; PLASMA DEPOSITION; PLASMAS; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); THERMOGRAVIMETRIC ANALYSIS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

CHEMICAL VAPOR DEPOSITION;

EID: 67349147039     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.03.047     Document Type: Article

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