Directed assembly of nano-particles with the help of charge patterns created with scanning electron microscope

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 803-805

  Zonnevylle, A C ^a   Hagen, C W ^a   Kruit, P ^a   Schmidt Ott, A ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Charging insulators; Directed nano particle deposition; Glowing wire generator; Scanning electron microscope

Indexed keywords

CHARGING INSULATORS; CHARGING PROCESS; DIRECTED ASSEMBLIES; DIRECTED NANO-PARTICLE DEPOSITION; FOCUSED ELECTRON BEAMS; GAS SUSPENSIONS; GLOWING WIRE GENERATOR; INSULATOR SURFACES; SCANNING ELECTRON MICROSCOPE; SPEED-UP; TIME-CONSUMING PROCESS;

ELECTRIC CHARGE; ELECTRON BEAMS; ELECTRONS; NANOPARTICLES; PALLADIUM; SCANNING; SCANNING ELECTRON MICROSCOPY; WIRE;

ELECTRON MICROSCOPES;

EID: 67349111955     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.11.077     Document Type: Article

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