Hydrogen sensing properties of Pd-doped SnO2 sputtered films with columnar nanostructures

Thin Solid Films

Volumn 517, Issue 21, 2009, Pages 6119-6123

  Shen, Yanbai ^a   Yamazaki, Toshinari ^a   Liu, Zhifu ^a   Meng, Dan ^a   Kikuta, Toshio ^a  

^a UNIVERSITY OF TOYAMA   (Japan)

Author keywords

Columnar nanostructures; Gas sensor; Hydrogen; Palladium; Sputtering; Tin oxide

Indexed keywords

BEFORE AND AFTER; CATALYTIC ACTIVITY; COLUMNAR NANOSTRUCTURES; DOPED FILMS; GAS PRESSURES; GAS SENSING; GAS SENSING PROPERTIES; GAS SENSOR; HYDROGEN SENSING PROPERTIES; NANO GRAINS; OPERATING TEMPERATURE; REACTIVE MAGNETRON SPUTTERING; SENSITIVITY INCREASE; SPUTTERED FILMS; STRUCTURAL CHARACTERIZATION; SUBSTRATE TEMPERATURE;

CHEMICAL SENSORS; DOPING (ADDITIVES); GAS DETECTORS; GAS SENSING ELECTRODES; GASES; HYDROGEN; NANOSTRUCTURES; SCANNING ELECTRON MICROSCOPY; TEMPERATURE; TIN;

PALLADIUM;

EID: 67249089563     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.05.036     Document Type: Article

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