Performance and lifetime of EUV source collectors measured with a full size EUV collector reflectometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6921, Issue , 2008, Pages

  Hinze, Ulf ^a   Chichkov, Boris N ^a   Feigl, Torsten ^b   Zeitner, Uwe D ^b   Damm, Christoph ^b   Bolshukhin, Denis ^c   Kleinschmidt, Jürgen ^c   Schriever, Guido ^c   Schürmann, Max Christian ^c  

^a LASER ZENTRUM HANNOVER E V   (Germany)

^b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^c XTREME Technologies GmbH   (Germany)

Author keywords

Collector reflectometer; Debris mitigation; Euv metrology; Euv source collector

Indexed keywords

AT-WAVELENGTH; COLLECTOR OPTICS; COLLECTOR REFLECTOMETER; CRITICAL ISSUES; DEBRIS MITIGATION; DIRECT IMPACT; EUV METROLOGY; EUV SOURCE; HIGH-POWER; LIFE-TIMES; LIFETIME TESTS; MEASUREMENT ACCURACY; MEASUREMENT RESULTS; MEASUREMENT SYSTEM; MEASURING EQUIPMENTS; OUTPUT PARAMETERS; PRECISE MEASUREMENTS; PULSE NUMBER; REALISTIC CONDITIONS; REPEATED MEASUREMENTS; SCHWARZSCHILD OBJECTIVE; SEMICONDUCTOR PRODUCTION; SPOT POSITION; SPOT SIZES;

DEBRIS; EXTREME ULTRAVIOLET LITHOGRAPHY; LIGHT SOURCES; MEASUREMENTS; OPTICAL MATERIALS; OPTICS; REFLECTOMETERS; ULTRAVIOLET DEVICES; UNITS OF MEASUREMENT;

COLLECTOR EFFICIENCY;

EID: 67149117686     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.772486     Document Type: Conference Paper

References (1)

1. Egbert, A., Tkachenko, B., Becker, S., and Chichkov, B. N., "Compact electron-based EUV source for at-wavelength metrology, " Proc. SPIE 5448 (2004).