Thin film transistor (TFT) sensing elements fabricated in surface micromachined polymermems for a differential calorimetric flow sensor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 583-586

  Tsang, S H ^a   Simard, K ^b   Foulds, I G ^b   Izadi, H ^c   Karim, K S ^c   Parameswaran, M ^b  

^a ANALOG DEVICES INC   (United States)

^b SIMON FRASER UNIVERSITY   (Canada)

^c UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE SENSING; AMORPHOUS SILICON THIN FILM TRANSISTORS; FABRICATION PROCESS; FABRICATION TECHNIQUE; FLOW-SENSOR; HYDROGENATED AMORPHOUS SILICON THIN FILMS; MICROMACHINED; SENSING ELEMENTS;

CALORIMETRY; FABRICATION; FUNCTIONAL POLYMERS; POLYIMIDES; POLYMERS; SEMICONDUCTING SILICON COMPOUNDS; SENSORS; THIN FILM TRANSISTORS; THIN FILMS;

AMORPHOUS SILICON;

EID: 65949121396     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805449     Document Type: Conference Paper

References (5)

1. V. K. Varadan, "Three dimensional polymer MEMS with functionalized carbon nanotubes and modified organic electronics," presented at Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on, 2003.
2. R. A. Street, Ed. , "Technology and Applications of Amorphous Silicon", New York, Springer Series, 2000
3. M. Elwenspoek and R. J. Wiegerink, "Mechanical Microsensors," Springer, 2001.
4. B. Chen, W. Wu, J. Chen, and C. Hong, "Temperature dependence of hydrogenated amorphous silicon thin-film transistors," Journal of Materials Science, vol. 30, pp. 2254-2256, 1995.
5. S. H. Tsang, D. Sameoto, I. G. Foulds, R. W. Johnstone, and M. Parameswaran, "Automated assembly of hingeless 900; out-of-plane microstructures," Journal of Micromechanics and Microengineering, vol. 17, pp. 1314-1325, 2007. (Pubitemid 47192952)