Fabrication of irregular optical phased arrays on silicon-on-insulator wafers

Optical Engineering

Volumn 47, Issue 4, 2008, Pages

  Xiao, Feng ^a   Li, Guangyuan ^a   Li, Yanping ^a   Xu, Anshi ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

irregular array; optical beam steering; optical phased array; phased array

Indexed keywords

IRREGULAR ARRAY; OPTICAL BEAM STEERING; OPTICAL BEAMS; OPTICAL PHASED ARRAYS; PHASE RETARDATION; SILICON ON INSULATOR WAFERS; SILICON-ON-INSULATOR MATERIALS; SINGLE MODE WAVEGUIDES;

ANTENNA PHASED ARRAYS; LIGHT MODULATION; SEMICONDUCTING SILICON COMPOUNDS;

SILICON WAFERS;

EID: 65949109651     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.2902475     Document Type: Article

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