High-Q RF coils on silicon integrated circuits

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4981, Issue , 2003, Pages 150-155

  Chua, Christopher L ^a   Fork, David K ^a   Van Schuylenbergh, Koenraad ^a   Lu, Jeng Ping ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; MICROMACHINING; OSCILLATORS (ELECTRONIC); SILICON;

SILICON INTEGRATED CIRCUITS;

ELECTRIC INDUCTORS;

EID: 0038397483     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472875     Document Type: Conference Paper

References (4)

1. H. Jiang, Z. Li, and N.C. Tien, "Reducing silicon-substrate porosities of on-chip transformers," IEEE International MEMS-02 Conference, Las Vegas, NV, pp. 649 - 652, 2002.
2. J. Chang, A. Abidi, and M. Gaitan, "Large suspended inductors on silicon and their use in a 2 ̈m CMOS RF amplifier," IEEE Electron. Device Lett., 14, pp. 246 - 248, 1993.
3. J. Van der Tang and D. Kasperkovitz, "Oscillator design efficiency: a new figure of merit for oscillator benchmarking," Proc. ISCAS, vol II, pp. 533-536, 2000.
4. The Impedance Measurement Handbook - A Guide to Measurement Technology and Techniques, 2nd Edn., Agilent Product Note 5950-3000, Agilent Technologies Co. Ltd, pp. 2-20, 2000.