Advanced micromachining combining nanosecond lasers with water jet-guided laser technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7201, Issue , 2009, Pages

  Pauchard, A ^a   Lee, K ^a   Vago, N ^a   Pavius, M ^a   Obi, S ^a  

^a Synova SA   (Switzerland)

Author keywords

Dot marking; Grooving; Laser; Micromachining; Short pulse; Water jet guided laser

Indexed keywords

AMORPHOUS SI; DOT MARKING; GREEN LASER; GROOVING; LASER TECHNOLOGIES; NANOSECOND LASERS; NEW INDUSTRY; POTENTIAL APPLICATIONS; SHORT PULSE; SHORT-PULSE LASER BEAMS; SI WAFER; THIN FILM SOLAR CELLS; WATER JET-GUIDED LASER; WATER JETS;

AMORPHOUS SILICON; COMPOSITE MICROMECHANICS; JETS; LASERS; MICROMACHINING; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; SILICON WAFERS; TECHNOLOGY;

PULSED LASER APPLICATIONS;

EID: 65649130094     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.814712     Document Type: Conference Paper

References (6)

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2. B. Richerzhagen, G. Delacretaz, R.P. Salathe, "Complete Model to Simulate the Thermal Defocusing of a Laser Beam Focused in Water," Optical Engineering, vol. 35, No. 7, pp. 2058-2066, 1996. (Pubitemid 126674643)
3. A. Pauchard, M. Di Marco, B. Carron, G. Suruceanu, B. Richerzhagen, A. Brulé, Notker Kling, "Recent developments in the cutting of ultra hard materials using water jet-guided laser technology", ALAC 2008 conference proceedings, 2008.
4. A. Pauchard, A. Spiegel, B. Richerzhagen, "Dicing of HB-LED devices embedded in copper or copper tungsten substrates", ICALEO 2008 conference proceedings, 2008.
5. rd Pacific International Conference on Application of Lasers and Optics 2008, 2008.
6. Hippo-532QW laser from Newport/Spectra Physics, http://www.newport.com