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Review of Scientific Instruments

Volumn 80, Issue 4, 2009, Pages

Nanoposition sensors with superior linear response to position and unlimited travel ranges

(2) Lee, Sheng Chiang a Peters, Randall D a

a MERCER UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE SENSING; COMMERCIAL SENSORS; CRITICAL ISSUES; DIRECT MEASUREMENTS; DYNAMIC RANGES; HIGH SPATIAL RESOLUTIONS; LINEAR RESPONSE; NANO FABRICATIONS; NANOPOSITIONERS; POSITION-SENSING; SUB-NANOMETER RESOLUTIONS; SUBNANOMETER; TRANSLATION STAGES; TRANSLATIONAL STAGES; TRANSVERSE DIRECTIONS; ULTRA WIDES;

SCANNING PROBE MICROSCOPY; SIGNAL PROCESSING; THICKNESS MEASUREMENT;

SENSORS;

EID: 65449163046 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3123407 Document Type: Article

Times cited : (13)

References (13)

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3
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- Refer to: for detailed information of this type of sensor produced by Physik Instrumente.
- Refer to: http://www.physikinstrumente.com/en/products/capacitive-sensor/ index.php for detailed information of this type of sensor produced by Physik Instrumente.

4
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- (Wiley, New York)
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- Nyce, D.S.¹

5
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- Refer to:; http://zone.ni.com/devzone/cda/ph/p/id/66; and http://www.chenyangism.com/CapaSensorPosi.htm for other designs and applications of capacitive positron sensors.
- Refer to: http://www.capsense.com/capsense-wp.pdf; http://zone.ni.com/ devzone/cda/ph/p/id/66; and http://www.chenyangism.com/CapaSensorPosi.htm for other designs and applications of capacitive positron sensors.

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