Nanocomposite AlTiNCO coatings deposited by reactive cathodic arc evaporation

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Vetter, Jörg ^a   Ishikawa, Takeshi ^b   Shima, Nabuhiko ^b  

^a Sulzer Metaplas GmbH   (Germany)

^b HITACHI LTD   (Japan)

Author keywords

Cathodic arc; Coatings; Free carbon; Friction; Nanostructures

Indexed keywords

CARBON ADDITION; CARBON CONTENT; CATHODIC ARC; CATHODIC ARC EVAPORATION; CHEMICAL COMPOSITIONS; CUTTING PERFORMANCE; DRY CUTTING; FREE CARBON; NANO-COMPOSITE STRUCTURE; NANOCRYSTALLINE CARBON; NANOCRYSTALLINE PHASIS;

CAVITY RESONATORS; EVAPORATION; FRICTION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MECHANICAL PROPERTIES; NANOCOMPOSITES; NANOCRYSTALLINE MATERIALS; NANOSTRUCTURES; RAMAN SPECTROSCOPY; VAPORS;

COATINGS;

EID: 65449152618     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200731702     Document Type: Conference Paper

References (22)

1. H. Freller, H. Haessler, Thin Solid Films 1987, 153, 67.
2. J. Vetter, Surf. Coat. Technol. 1995, 76-77, 719.
3. D. McIntyre, J. E. Greene, G. Hakansson, J.-E. Sundgren, W. D. Münz, J. Appl. Phys. 1990, 67, 1542.
4. J. Vetter, J. Adv. Mater. 1999, 31, 41.
5. J. Vetter, V. von der Heide, A. Mohnfeld, Proceedings of the 44th Annual Technical Conference Society of Vacuum Coater, Philadelphia, PA, 2001, p. 415.
6. O. Banakh, P. Schmid, R. Sanjines, F. Levy, Surf. Coat. Technol. 2003, 163-164, 57.
7. J. Vetter, E. Lugscheider, S. S. Guerreiro, Surf. Coat. Technol. 1998, 98, 1233.
8. S. Veprek, S. Reiprich, Thin Solid Films 1995, 268, 64.
9. L. Rebouta, F. Vaz, M. Andritschky, M. F. da Silvia, Surf. Coat. Technol. 1995, 76-77, 70.
10. M. I. Lembke, D. B. Lewis, W.-D. Münz, J. M. Titchmarsh, Surf. Eng. 2001, 17, 153.
11. J. Vetter, V. von der Heide, Surf. Coat. Technol. 2003, 174-175, 615.
12. D. Heim, R. Hochreiter, Surf. Coat. Technol. 1998, 98, 1553.
13. S. Veprek, A. S. Argon, Surf. Coat. Technol. 2001, 146-147, 175.
14. Hitachi Tool Engineering, Ltd., Japan, Tokyo, Narita, Information brochures.
15. J. Shieh, M. H. Hon, J. Vac. Sci. Technol. 2002, A20, 87.
16. J. M. Lackner, W. Waldhauser, R. Ebner, R. J. Bakker, T. Schöberl, B. Major, Thin Solid Films 2004, 68, 125.
17. M. Stüber, P. B. Bama, M. C. Simmonds, U. Albers, H. Leiste, C. Ziebert, H. Holleck, A. Kovacs, P. Hovsepian, I. Gee, Thin Solid Films 2005, 493, 104.
18. J. Vetter, A. J. Perry, Surf. Coat. Technol. 1993, 61, 305.
19. J. Vetter, T. Wallendorf, Surf. Coat. Technol. 1995, 76-77, 322.
20. J. A. Sue, A. J. Perry, J. Vetter, Surf. Coat. Technol. 1994, 68-69, 126.
21. C. A. Klein, J. Appl. Phys. 2000, 1 5487.
22. A. C. Ferrari, J. Robertson, Phys. Rev. B 2000, 61, 14095.