The electronegative plasma pre-sheath in magnetic field and extraction of negative ions

AIP Conference Proceedings

Volumn 1097, Issue , 2009, Pages 31-37

  Annaratone, B M ^a   JEAllen, ^b  

^a CNRS   (France)

^b UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

Extraction region; Negative ions; Rf icp negative ion sources

Indexed keywords

EID: 65349191759     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3112528     Document Type: Conference Paper

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