Diagnostics of the electronegative plasma sheath at low pressures using microparticles

Physical Review Letters

Volumn 93, Issue 18, 2004, Pages

  Annaratone, B M ^a   Antonova, T ^a   Thomas, H M ^a   Morfill, G E ^a  

^a MAX PLANCK INSTITUT FÜR EXTRATERRESTRISCHE PHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC DISCHARGES; ELECTROSTATICS; MATHEMATICAL MODELS; NEGATIVE IONS; PLASMA DIAGNOSTICS; PLASMA ETCHING;

ELECTRONEGATIVE DISCHARGES; ELECTRONEGATIVE PLASMAS; PLASMA BOUNDARIES;

PLASMA SHEATHS;

EID: 19744381820     PISSN: 00319007     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevLett.93.185001     Document Type: Article

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