Simultaneous and wireless measurement of CO2 and humidity using a SAW reflective delay line

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 7207, Issue , 2009, Pages

  Lim, Chunbae ^a   Wang, Wen ^a   Lee, Keekeun ^a   Oh, Hae Kwan ^a   Yang, Sangsik ^a  

^a Ajou University   (South Korea)

Author keywords

CO2; Humidity; Reflective delay line; SAW chemical sensor; Wireless

Indexed keywords

CO2; CONCENTRATION OF; COUPLING OF MODES; GRATING REFLECTORS; HIGH SENSITIVITIES; HUMIDITY; HUMIDITY SENSING; INTER-DIGITAL TRANSDUCERS; PASSIVE SURFACES; PIEZOELECTRIC SUBSTRATES; PROPAGATION DIRECTIONS; REFLECTION COEFFICIENTS; REFLECTION PEAKS; REFLECTIVE DELAY LINE; RELATIVE HUMIDITIES; SAW DEVICES; SENSITIVE FILMS; SENSITIVITY EVALUATIONS; SENSOR ELEMENTS; SIGNAL TO NOISE; SIMULTANEOUS MEASUREMENTS; SMALL SIGNALS; TEFLON AF; TIME DOMAINS; WATER-VAPOR SENSING; WIRELESS; WIRELESS MEASUREMENTS;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ATMOSPHERIC HUMIDITY; CHEMICAL SENSORS; GAS PERMEABLE MEMBRANES; MICROSYSTEMS; MOISTURE; PIEZOELECTRIC TRANSDUCERS; REFLECTION; SIGNAL PROCESSING; SILICON COMPOUNDS; SODIUM COMPOUNDS; ULTRASONIC TRANSDUCERS; WATER VAPOR; WAVES;

HUMIDITY CONTROL;

EID: 65349187051     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.809994     Document Type: Conference Paper

References (10)

1. H. Wohltjen and R. Ressy, "Surface acoustic wave probe for chemical analysis, Parts I-III", Anal chem. 51, 1458-1475(1979).
2. R.D.S. Ballantine, R.M. White, S.J. Martin and A.J. Kicoo, Acoustic wave sensors, SanDiego: academic, 1997.
3. A. Springera, R. Weigela, A. Pohlb, and F. Seifert, "Wireless identi®cation and sensing using surface acoustic wave devices", Mechatronics 9, 745-756(1999).
4. W. Wang, K. Lee, T. Kim, I. Park and S. Yang, "A novel wireless, passive CO2 sensor incorporating a surface acoustic wave reflective delay line", Smart Mater. Struct. 16 1382-1389 (2007).
5. Hashimoto Ken-ya, Surface Acoustic Wave Devices in Telecommunications- Modeling and Simulation (New York: Springer Verlag), 2000.
6. P. L. Kebabian and A. Freedman, "Fluoropolymer-based capacitive carbon dioxide sensor", Meas. Sci. Technol. 17, 703-710(2006).
7. R.D. Hollinger, A.R. Tellakula and C.T. Li, "Wireless surface acoustic wave-based humidity sensor", SPIE, 3876, 56-62(1999).
8. M. Jungwirth, H. Scherr, and R. Weigel, "Micromechanical precision pressure sensor incorporating SAW delay lines", Acta Mech. 158 227-252(2002)
9. P. V. Wright, "Analysis and design of low loss SAW devices with internal reflections using coupling-of-mode theory", IEEE Ultrason. Symp. 141-152(1989).
10. B. P. Abbott and C. S. Hartmann, "A coupling-of-modes analysis of chirped transducers containing reflective electrode geometries", IEEE Ultrason. Symp. 129-134(1989)