Micromechanical precision pressure sensor incorporating SAW delay lines

Acta Mechanica

Volumn 158, Issue 3-4, 2002, Pages 227-252

  Jungwirth, M ^a   Scherr, H ^b   Weigel, R ^a  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

^b SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; COMPOSITE MICROMECHANICS; ELECTRIC DELAY LINES; FINITE ELEMENT METHOD; PHASE SHIFT; SENSITIVITY ANALYSIS; SENSORS;

REFLECTIVE DELAY LINES (RDL);

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0036444063     PISSN: 00015970     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF01176911     Document Type: Article

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