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Volumn 48, Issue 11, 2009, Pages 2058-2066

Influence of optical standing waves on the femtosecond laser-induced forward transfer of transparent thin films

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC WAVES; MASS TRANSFER;

EID: 65249124632     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.48.002058     Document Type: Article
Times cited : (13)

References (39)
  • 1
    • 0000762972 scopus 로고
    • Metal deposition from a supported metal film using an excimer laser
    • J. Bohandy, B. Kim, and F. Adrian, "Metal deposition from a supported metal film using an excimer laser," J. Appl. Phys. 60, 1538-1539 (1986).
    • (1986) J. Appl. Phys , vol.60 , pp. 1538-1539
    • Bohandy, J.1    Kim, B.2    Adrian, F.3
  • 2
    • 21344444406 scopus 로고    scopus 로고
    • Microdroplet deposition by laser- induced forward transfer
    • D. Willis and V. Grosu, "Microdroplet deposition by laser- induced forward transfer," Appl. Phys. Lett. 86, 244103 (2005).
    • (2005) Appl. Phys. Lett , vol.86 , pp. 244103
    • Willis, D.1    Grosu, V.2
  • 3
    • 0000151904 scopus 로고
    • A study of the mechanism of metal deposition by the laser-induced forward transfer process
    • F. Adrian, J. Bohandy, B. Kim, A. Jette, and P. Thompson, "A study of the mechanism of metal deposition by the laser-induced forward transfer process," J. Vac. Sci. Technol. B 5, 1490-1494 (1987).
    • (1987) J. Vac. Sci. Technol. B , vol.5 , pp. 1490-1494
    • Adrian, F.1    Bohandy, J.2    Kim, B.3    Jette, A.4    Thompson, P.5
  • 4
    • 0000117054 scopus 로고
    • Minimum fiuence for laser blow-off of thin gold films at 248 and 532 nm
    • R. Baseman and N. Froberg, "Minimum fiuence for laser blow-off of thin gold films at 248 and 532 nm," Appl. Phys. Lett. 56, 1412-1414 (1990).
    • (1990) Appl. Phys. Lett , vol.56 , pp. 1412-1414
    • Baseman, R.1    Froberg, N.2
  • 5
    • 0025680412 scopus 로고
    • Surface patterning by pulsed laser induced transfer of metals and compounds
    • Z. Toth, Z. Kantor, P. Mogyorosi, and T. Szorenyi, "Surface patterning by pulsed laser induced transfer of metals and compounds," Proc. SPIE 1279, 150-157 (1990).
    • (1990) Proc. SPIE , vol.1279 , pp. 150-157
    • Toth, Z.1    Kantor, Z.2    Mogyorosi, P.3    Szorenyi, T.4
  • 6
    • 0029250872 scopus 로고
    • New approach of a laser-induced forward transfer for deposition of patterned thin metal films
    • H. Esrom, J. Zhang, U. Kogelschatz, and A. Pedraza, "New approach of a laser-induced forward transfer for deposition of patterned thin metal films," Appl. Surf. Sci. 86, 202-207 (1995).
    • (1995) Appl. Surf. Sci , vol.86 , pp. 202-207
    • Esrom, H.1    Zhang, J.2    Kogelschatz, U.3    Pedraza, A.4
  • 7
    • 0037443204 scopus 로고    scopus 로고
    • A comparative schlieren imaging study between ns and sub-ps laser forward transfer of cr
    • I. Zergioti, D. Papazoglou, A. Karaiskou, C. Fotakis, E. Gamaly, and A. Rode, "A comparative schlieren imaging study between ns and sub-ps laser forward transfer of cr," Appl. Surf. Sci. 208-209, 177-180 (2003).
    • (2003) Appl. Surf. Sci , vol.208-209 , pp. 177-180
    • Zergioti, I.1    Papazoglou, D.2    Karaiskou, A.3    Fotakis, C.4    Gamaly, E.5    Rode, A.6
  • 8
    • 0000545858 scopus 로고    scopus 로고
    • Time-resolved microscopic imaging of the laser-induced forward transfer process
    • Y. Nakata and T. Okada, "Time-resolved microscopic imaging of the laser-induced forward transfer process," Appl. Phys. A 69, S275-S278 (1999).
    • (1999) Appl. Phys. A , vol.69
    • Nakata, Y.1    Okada, T.2
  • 9
    • 0343396333 scopus 로고    scopus 로고
    • Single-shot, high repetition rate metallic pattern transfer
    • R. Bahnisch, W. Gross, and A. Menschig, "Single-shot, high repetition rate metallic pattern transfer," Microelectron. Eng. 50, 541-546 (2000).
    • (2000) Microelectron. Eng , vol.50 , pp. 541-546
    • Bahnisch, R.1    Gross, W.2    Menschig, A.3
  • 10
    • 0037470511 scopus 로고    scopus 로고
    • Selective surface texturing using femtosecond pulsed laser induced forward transfer
    • B. Tan, K. Venkatakrishnan, and K. Tok, "Selective surface texturing using femtosecond pulsed laser induced forward transfer," Appl. Surf. Sci. 207, 365-371 (2003).
    • (2003) Appl. Surf. Sci , vol.207 , pp. 365-371
    • Tan, B.1    Venkatakrishnan, K.2    Tok, K.3
  • 11
    • 1242310507 scopus 로고    scopus 로고
    • Single-step patterning and the fabrication of contact masks by laser-induced forward transfer
    • L. Landstrom, J. Klimstein, G. Schrems, K. Piglmayer, and D. Bauerle, "Single-step patterning and the fabrication of contact masks by laser-induced forward transfer," Appl. Phys. A 78, 537-548 (2004).
    • (2004) Appl. Phys. A , vol.78 , pp. 537-548
    • Landstrom, L.1    Klimstein, J.2    Schrems, G.3    Piglmayer, K.4    Bauerle, D.5
  • 14
    • 17944382213 scopus 로고    scopus 로고
    • Laser-induced forward transfer of tio-au nanocomposite films for maskless patterning
    • H. Sakata, S. Chakraborty, E. Yokoyama, M. Wakaki, and D. Chakravorty, "Laser-induced forward transfer of tio-au nanocomposite films for maskless patterning," Appl. Phys. Lett. 86, 114104 (2005).
    • (2005) Appl. Phys. Lett , vol.86 , pp. 114104
    • Sakata, H.1    Chakraborty, S.2    Yokoyama, E.3    Wakaki, M.4    Chakravorty, D.5
  • 16
    • 0029255911 scopus 로고
    • Laser-induced forward transfer of ultra-fine diamond particles for selective deposition of diamond films
    • S. Pimenov, G. Shafeev, A. Smolin, V. Konov, and B. Vodolaga, "Laser-induced forward transfer of ultra-fine diamond particles for selective deposition of diamond films," Appl. Surf. Sci. 86, 208-212 (1995).
    • (1995) Appl. Surf. Sci , vol.86 , pp. 208-212
    • Pimenov, S.1    Shafeev, G.2    Smolin, A.3    Konov, V.4    Vodolaga, B.5
  • 17
    • 33144462248 scopus 로고    scopus 로고
    • Fabrication of carbon nanotube field emission cathodes in patterns by a laser transfer method
    • S. Chang-Jian, J. Ho, J. Cheng, and C. Sung, "Fabrication of carbon nanotube field emission cathodes in patterns by a laser transfer method," Nanotechnology 17, 1184-1187 (2006).
    • (2006) Nanotechnology , vol.17 , pp. 1184-1187
    • Chang-Jian, S.1    Ho, J.2    Cheng, J.3    Sung, C.4
  • 18
    • 36248979282 scopus 로고    scopus 로고
    • Experimental investigations of laser-induced forward transfer process of organic thin films
    • B. Thomas, A. Alloncle, P. Delaporte, M. Sentis, S. Sanaur, M. Barret, and P. Collot, "Experimental investigations of laser-induced forward transfer process of organic thin films," Appl. Surf. Sci. 254, 1206-1210 (2007).
    • (2007) Appl. Surf. Sci , vol.254 , pp. 1206-1210
    • Thomas, B.1    Alloncle, A.2    Delaporte, P.3    Sentis, M.4    Sanaur, S.5    Barret, M.6    Collot, P.7
  • 19
    • 34548542354 scopus 로고    scopus 로고
    • A sensor for adenosine triphosphate fabricated by laser-induced forward transfer of luciferase onto a poly(dimethylsiloxane) microchip
    • Y. Tsuboi, Y. Furuhata, and N. Kitamura, "A sensor for adenosine triphosphate fabricated by laser-induced forward transfer of luciferase onto a poly(dimethylsiloxane) microchip," Appl. Surf. Sci. 253, 8422-8427 (2007).
    • (2007) Appl. Surf. Sci , vol.253 , pp. 8422-8427
    • Tsuboi, Y.1    Furuhata, Y.2    Kitamura, N.3
  • 20
    • 33750183526 scopus 로고    scopus 로고
    • Micro-droplet deposition of copper film by femtosecond laser-induced forward transfer
    • L. Yang, C. Wang, X. Ni, Z. Wang, W. Jia, and L. Chai, "Micro-droplet deposition of copper film by femtosecond laser-induced forward transfer," Appl. Phys. Lett. 89, 161110 (2006).
    • (2006) Appl. Phys. Lett , vol.89 , pp. 161110
    • Yang, L.1    Wang, C.2    Ni, X.3    Wang, Z.4    Jia, W.5    Chai, L.6
  • 21
    • 33750904128 scopus 로고    scopus 로고
    • Nanodroplets deposited in microarrays by femtosecond tirsapphire laser induced forward transfer
    • D. Banks, C. Grivas, J. Mills, I. Zergioti, and R. Eason, "Nanodroplets deposited in microarrays by femtosecond tirsapphire laser induced forward transfer," Appl. Phys. Lett. 89, 193107 (2006).
    • (2006) Appl. Phys. Lett , vol.89 , pp. 193107
    • Banks, D.1    Grivas, C.2    Mills, J.3    Zergioti, I.4    Eason, R.5
  • 22
    • 34548554163 scopus 로고    scopus 로고
    • Optimization study of the femtosecond laser-induced forward-transfer process with thin aluminium films
    • S. Bera, A Sabbah, J. Yarbrough, C. Allen, B. Winters, C. Durfee, and J. Squier, "Optimization study of the femtosecond laser-induced forward-transfer process with thin aluminium films," Appl. Opt. 46, 4650-4659 (2007).
    • (2007) Appl. Opt , vol.46 , pp. 4650-4659
    • Bera, S.1    Sabbah, A.2    Yarbrough, J.3    Allen, C.4    Winters, B.5    Durfee, C.6    Squier, J.7
  • 23
    • 34447326974 scopus 로고    scopus 로고
    • Electrodes for microfluidic devices produced by laser induced forward transfer
    • C. Germain, L. Charron, L. Lilge, and Y. Tsui, "Electrodes for microfluidic devices produced by laser induced forward transfer," Appl. Surf. Sci. 253, 8328-8333 (2007).
    • (2007) Appl. Surf. Sci , vol.253 , pp. 8328-8333
    • Germain, C.1    Charron, L.2    Lilge, L.3    Tsui, Y.4
  • 24
    • 34548834994 scopus 로고    scopus 로고
    • Laser patterning of zn for zno nanostructure growth: Comparison between laser induced forward transfer in air and in vacuum
    • F. Claeyssens, A. Klini, A. Mourka, and C. Fotakis, "Laser patterning of zn for zno nanostructure growth: Comparison between laser induced forward transfer in air and in vacuum," Thin Solid Films 515, 8529-8533 (2007).
    • (2007) Thin Solid Films , vol.515 , pp. 8529-8533
    • Claeyssens, F.1    Klini, A.2    Mourka, A.3    Fotakis, C.4
  • 26
    • 40349112988 scopus 로고    scopus 로고
    • Ballistic laser assisted solid transfer (blast) from a thin film precursor
    • D. Banks, C. Grivas, I. Zergioti, and R. Eason, "Ballistic laser assisted solid transfer (blast) from a thin film precursor," Opt. Express 16, 3249-3254 (2008).
    • (2008) Opt. Express , vol.16 , pp. 3249-3254
    • Banks, D.1    Grivas, C.2    Zergioti, I.3    Eason, R.4
  • 28
    • 0027625258 scopus 로고
    • High speed color imaging by laser ablation transfer with a dynamic release layer: Fundamental mechanisms
    • W. Tolbert, I. Lee, M. Doxtader, E. Ellis, and D. Dlott, "High speed color imaging by laser ablation transfer with a dynamic release layer: fundamental mechanisms," J. Imaging Sci. Technol. 37, 411-421 (1993).
    • (1993) J. Imaging Sci. Technol , vol.37 , pp. 411-421
    • Tolbert, W.1    Lee, I.2    Doxtader, M.3    Ellis, E.4    Dlott, D.5
  • 29
    • 4944263725 scopus 로고    scopus 로고
    • Preparation of functional DNA microarrays through laser-induced forward transfer
    • P. Serra, M. Colina, J. Fernandez-Pradas, L. Sevilla, and J. Morenza, "Preparation of functional DNA microarrays through laser-induced forward transfer," Appl. Phys. Lett. 85, 1639-1641 (2004).
    • (2004) Appl. Phys. Lett , vol.85 , pp. 1639-1641
    • Serra, P.1    Colina, M.2    Fernandez-Pradas, J.3    Sevilla, L.4    Morenza, J.5
  • 30
    • 0037455205 scopus 로고    scopus 로고
    • Large area, high resolution, dry printing of conducting polymers for organic electronics
    • G. Blanchet, Y.-L. Loo, J. Rogers, F. Gao, and C. Fincher, "Large area, high resolution, dry printing of conducting polymers for organic electronics," Appl. Phys. Lett. 82, 463-465 (2003).
    • (2003) Appl. Phys. Lett , vol.82 , pp. 463-465
    • Blanchet, G.1    Loo, Y.-L.2    Rogers, J.3    Gao, F.4    Fincher, C.5
  • 31
    • 34547829421 scopus 로고    scopus 로고
    • Fabrication of organic light-emitting diode pixels by laser-assisted forward transfer
    • R. Fardel, M. Nagel, F. Nuesch, T. Lippert, and A. Wokaun, "Fabrication of organic light-emitting diode pixels by laser-assisted forward transfer," Appl. Phys. Lett. 91, 061103 (2007).
    • (2007) Appl. Phys. Lett , vol.91 , pp. 061103
    • Fardel, R.1    Nagel, M.2    Nuesch, F.3    Lippert, T.4    Wokaun, A.5
  • 32
    • 33646742160 scopus 로고    scopus 로고
    • Study on metal microparticle content of the material transferred with absorbing film assisted laser induced forward transfer when using silver absorbing layer
    • T. Smausz, B. Hopp, G. Kecskemeti, and Z. Bor, "Study on metal microparticle content of the material transferred with absorbing film assisted laser induced forward transfer when using silver absorbing layer," Appl. Surf. Sci. 252, 4738-4742 (2006).
    • (2006) Appl. Surf. Sci , vol.252 , pp. 4738-4742
    • Smausz, T.1    Hopp, B.2    Kecskemeti, G.3    Bor, Z.4
  • 33
    • 36248984247 scopus 로고    scopus 로고
    • Laser forward transfer using a sacrificial layer: Influence of the material properties
    • R. Fardel, M. Nagel, F. Nuesch, T. Lippert, and A. Wokaun, "Laser forward transfer using a sacrificial layer: influence of the material properties," Appl. Surf. Sci. 254, 1322-1326 (2007).
    • (2007) Appl. Surf. Sci , vol.254 , pp. 1322-1326
    • Fardel, R.1    Nagel, M.2    Nuesch, F.3    Lippert, T.4    Wokaun, A.5
  • 34
    • 35549008874 scopus 로고    scopus 로고
    • Thick film laser induced forward transfer for deposition of thermally and mechanically sensitive materials
    • N. Kattamis, P. Purnick, R. Weiss, and C. Arnold, "Thick film laser induced forward transfer for deposition of thermally and mechanically sensitive materials," Appl. Phys. Lett. 91, 171120 (2007).
    • (2007) Appl. Phys. Lett , vol.91 , pp. 171120
    • Kattamis, N.1    Purnick, P.2    Weiss, R.3    Arnold, C.4
  • 35
    • 79051469604 scopus 로고    scopus 로고
    • Triazene photopolymer dynamic release layer-assisted femtosecond laser-induced forward transfer with an active carrier substrate
    • D. Banks, K. Kaur, R. Gazia, R. Fardel, M. Nagel, T. Lippert, and R. Eason, "Triazene photopolymer dynamic release layer-assisted femtosecond laser-induced forward transfer with an active carrier substrate," Europhys. Lett. 83, 38003 (2008).
    • (2008) Europhys. Lett , vol.83 , pp. 38003
    • Banks, D.1    Kaur, K.2    Gazia, R.3    Fardel, R.4    Nagel, M.5    Lippert, T.6    Eason, R.7
  • 36
    • 34547773767 scopus 로고    scopus 로고
    • Aryltriazene photopolymers for uv-laser applications: Improved synthesis and photodecomposition study
    • M. Nagel, R. Hany, T. Lippert, M. Molberg, F. Nuesch, and D. Rentsch, "Aryltriazene photopolymers for uv-laser applications: Improved synthesis and photodecomposition study," Macromol. Chem. Phys. 208, 277-286 (2007).
    • (2007) Macromol. Chem. Phys , vol.208 , pp. 277-286
    • Nagel, M.1    Hany, R.2    Lippert, T.3    Molberg, M.4    Nuesch, F.5    Rentsch, D.6
  • 37
  • 38
    • 0000424502 scopus 로고
    • Analytical expression for the standing wave intensity in photoresist
    • C. Mack, "Analytical expression for the standing wave intensity in photoresist," Appl. Opt. 25, 1958-1961 (1986).
    • (1986) Appl. Opt , vol.25 , pp. 1958-1961
    • Mack, C.1
  • 39
    • 34447295929 scopus 로고    scopus 로고
    • Femtosecond and nanosecond laser damage thresholds of doped and undoped triazenepolymer thin films
    • J. Bonse, J. Solis, L. Urech, T. Lippert, and A. Wokaun, "Femtosecond and nanosecond laser damage thresholds of doped and undoped triazenepolymer thin films," Appl. Surf. Sci. 253, 7787-7791 (2007).
    • (2007) Appl. Surf. Sci , vol.253 , pp. 7787-7791
    • Bonse, J.1    Solis, J.2    Urech, L.3    Lippert, T.4    Wokaun, A.5


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