Single Si3N4 layer on dual substrate for pH sensing micro sensor

SAS 2009 - IEEE Sensors Applications Symposium Proceedings

Volumn , Issue , 2009, Pages 61-64

  Wang, S C ^a   Lai, C S ^a   Lue, C E ^a   Yang, C M ^b  

^a CHANG GUNG UNIVERSITY   (Taiwan)

^b Inotera Memories   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DRIFT EFFECTS; EIS STRUCTURES; HYSTERESIS EFFECTS; MICRO SENSORS; P-TYPE SUBSTRATES; PH SENSING; PH SENSITIVITIES; SENSING MEMBRANES;

ELECTROCHEMICAL CORROSION; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; PH SENSORS; SYNTHETIC APERTURE SONAR;

SENSORS;

EID: 65249115887     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SAS.2009.4801778     Document Type: Conference Paper

References (8)

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